Search Results - "Gu, Sipeng"

Process monitoring using advanced inspection methodologies - a study with CVD by Gaan, S., Zhiguo Sun, Sipeng Gu, Lee, Y. B., Palamadai, Chandar, Li, Joey, Lingyan Zhao, Fan, Lucy

“…Defect free film deposition is one of the most challenging steps in CMOS manufacturing for 28nm process node and beyond. For precise control over surface,…”
Get full text

Wafer Level Variability Improvement by Spatial Source/Drain Activation and Ion Implantation Super Scan for FinFET Technology by Wang, Yanzhen, Yong, Yoong Hooi, Liu, Bingwu, Zhou, Dibao, Togo, Mitsuhiro, Choi, Dongil, Lee, Jae Gon, Lo, Hsien-Ching, Dou, Xinyuan, Gu, Sipeng, Shintri, Shashidhar, Tong, Weihua, Sargunas, Vidmantas, Argandona, Jorge

“…In this paper, CMOS wafer level ring oscillator frequency variability improvement >40% is demonstrated by either spatial source/drain activation or ion…”
Get full text

Synthesis and characterization of atmospheric pressure chemically vapor deposited aluminum by Gu, Sipeng

“…This study investigates the use of atmospheric pressure chemical vapor deposition (APCVD) to produce high quality aluminum coatings for corrosion protection of…”
Get full text

Synthesis and characterization of atmospheric pressure chemically vapor deposited aluminum by Gu, Sipeng

“…This study investigates the use of atmospheric pressure chemical vapor deposition (APCVD) to produce high quality aluminum coatings for corrosion protection of…”
Get full text

Thermal phase change and activation energy of crystallization of Ge-Sb-Te-Sn thin films

“…O4; To improve the optical storage performance, Sn was doped into Ge2Sb2Te5 phase change thin films. The optical and thermal properties of Sn-doped Ge2Sb2Te5…”
Get full text