Search Results - "Grill, Alfred"

Porous pSiCOH Ultralow- k Dielectrics for Chip Interconnects Prepared by PECVD by Grill, Alfred

“…Porous pSiCOH materials with ultralow dielectric constants (ulk) have been developed with dielectric constants reaching values below 2.0. The pSiCOH films,…”
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Wafer-Scale Graphene Integrated Circuit by Lin, Yu-Ming, Valdes-Garcia, Alberto, Han, Shu-Jen, Farmer, Damon B., Meric, Inanc, Sun, Yanning, Wu, Yanqing, Dimitrakopoulos, Christos, Grill, Alfred, Avouris, Phaedon, Jenkins, Keith A.

“…A wafer-scale graphene circuit was demonstrated in which all circuit components, including graphene field-effect transistor and inductors, were monolithically…”
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Epitaxial Graphene Nanoribbon Array Fabrication Using BCP-Assisted Nanolithography by Liu, Guanxiong, Wu, Yanqing, Lin, Yu-Ming, Farmer, Damon B, Ott, John A, Bruley, John, Grill, Alfred, Avouris, Phaedon, Pfeiffer, Dirk, Balandin, Alexander A, Dimitrakopoulos, Christos

“…A process for fabricating dense graphene nanoribbon arrays using self-assembled patterns of block copolymers on graphene grown epitaxially on SiC on the wafer…”
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Effect of SiC wafer miscut angle on the morphology and Hall mobility of epitaxially grown graphene by Dimitrakopoulos, Christos, Grill, Alfred, McArdle, Timothy J., Liu, Zihong, Wisnieff, Robert, Antoniadis, Dimitri A.

“…We show that the surface morphology and electrical properties of graphene grown on SiC(0001) wafers depend strongly on miscut angle, even for nominally…”
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Multicarrier transport in epitaxial multilayer graphene by Lin, Yu-Ming, Dimitrakopoulos, Christos, Farmer, Damon B., Han, Shu-Jen, Wu, Yanqing, Zhu, Wenjuan, Gaskill, D. Kurt, Tedesco, Joseph L., Myers-Ward, Rachael L., Eddy, Charles R., Grill, Alfred, Avouris, Phaedon

“…Variable-field Hall measurements were performed on epitaxial graphene grown on Si-face and C-face SiC. The carrier transport involves essentially a single-type…”
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How to restore superlow friction of DLC: the healing effect of hydrogen gas by Fontaine, Julien, Belin, Michel, Le Mogne, Thierry, Grill, Alfred

“…Among diamond-like carbon coatings, hydrogenated amorphous carbon films have the characteristic of exhibiting superlow friction under ultra-high vacuum…”
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Multilayer epitaxial graphene formed by pyrolysis of polycrystalline silicon-carbide grown on c-plane sapphire substrates by McArdle, Timothy J., Chu, Jack O., Zhu, Yu, Liu, Zihong, Krishnan, Mahadevaiyer, Breslin, Christopher M., Dimitrakopoulos, Christos, Wisnieff, Robert, Grill, Alfred

“…We use ultrahigh vacuum chemical vapor deposition to grow polycrystalline silicon carbide (SiC) on c-plane sapphire wafers, which are then annealed between…”
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Nanoindentation Analysis of Mechanical Properties of Low to Ultralow Dielectric Constant SiCOH Films by Wang, Lugen, Ganor, M., Rokhlin, S.I., Grill, Alfred

“…Carbon-doped oxide SiCOH films with low to ultralow dielectric constants were prepared on a Si substrate by plasma-enhanced chemical vapor deposition (PECVD)…”
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Diamond-like carbon: state of the art by Grill, Alfred

“…Diamond-like carbon films, amorphous hydrogenated or non-hydrogenated forms of carbon, are metastable amorphous materials characterized by attractive…”
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SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery by Myers, John N., Zhang, Xiaoxian, Huang, Huai, Shobha, Hosadurga, Grill, Alfred, Chen, Zhan

“…Molecular structures at the surface and buried interface of an amorphous ultralow-k pSiCOH dielectric film were quantitatively characterized before and after…”
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Optimal Filler Sizes for Thermal Interface Materials by Chowdhury, Piyas, Sikka, Kamal, Grill, Alfred, Parekh, Dishit P.

“…The principal challenge in developing a new thermal interface material (TIM)is to co-design its micro-attributes (e.g. filler type, packing fraction, size…”
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Effect of SiC wafer miscut angle on the morphology and Hall mobilityof epitaxially grown graphene by Dimitrakopoulos, Christos, Grill, Alfred, McArdle, Timothy J., Liu, Zihong, Wisnieff, Robert, Antoniadis, Dimitri A.

“…We show that the surface morphology and electrical properties of graphene grown on SiC(0001) wafers depend strongly on miscut angle, even for nominally…”
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Chemical solution deposition of BaSrTiO3 films by Neumayer, Deborah A., Duncombe, Peter R., Laibowitz, Robert B., Grill, Alfred

“…We compared three chemical solution deposition routes to Ba x Sr 1-x TiO 3 (BST) films. A metal organic decomposition (MOD) solution composed of barium and…”
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Multilayer epitaxial graphene formed by pyrolysis of polycrystallinesilicon-carbide grown on c-plane sapphire substrates by McArdle, Timothy J., Chu, Jack O., Zhu, Yu, Liu, Zihong, Krishnan, Mahadevaiyer, Breslin, Christopher M., Dimitrakopoulos, Christos, Wisnieff, Robert, Grill, Alfred

“…We use ultrahigh vacuum chemical vapor deposition to grow polycrystalline silicon carbide (SiC) on c-plane sapphire wafers, which are then annealed between…”
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Fluorinated diamond-like carbon protective coating for magnetic recording media devices by Grill, Alfred

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CD-SEM metrology evaluation of gate-all-around Si nanowire MOSFET with improved control of nanowire suspension by using a buried boron nitride etch-stop layer by Cohen, Guy M., Shi, Leathen, Bangsaruntip, Sarunya, Grill, Alfred, Neumayer, Deborah, Levi, Shimon, Weinberg, Yakov, Shoval, Ori, Adan, Ofer, Tzi, Maayan Bar, Conley, Amiad

“…In this work, we report a new fabrication method of Si nanowires that enables an accurate control of the suspension gap underneath the Si wire. It is achieved…”
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Frequency response of top-gated carbon nanotube field-effect transistors by Singh, D.V., Jenkins, K.A., Appenzeller, J., Neumayer, D., Grill, A., Wong, H.-S.P.

“…The ac performance of carbon nanotube field-effect transistors (CNFETs) has been characterized using two approaches involving: 1) time- and 2) frequency-domain…”
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Graphene technology for RF and THz applications by Valdes-Garcia, Alberto, Fegnian Xia, Shu-Jen Han, Farmer, Damon B., Dimitrakopoulos, Christos, Oida, Satoshi, Hugen Yan, Yanqing Wu, Hedges, Crystal M., Jenkins, Keith A., Pfeiffer, Dirk, Grill, Alfred, Avouris, Phaedon, Haensch, Wilfried

“…This work presents recent advances in the development of graphene technology for various applications from RF to THz frequencies. First, large-scale graphene…”
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Electrical characterization of wafer-scale epitaxial graphene and its RF applications by Yu-Ming Lin, Jenkins, K. A., Ott, J., Dimitrakopoulos, C., Farmer, D. B., Yanqing Wu, Grill, A., Avouris, P.

“…High-performance graphene field-effect transistors are fabricated on two-inch graphene-on-SiC wafers. Epitaxial graphene was synthesized on SiC wafers by…”
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Post porosity plasma protection integration at 48 nm pitch by Huai Huang, Lionti, Krystelle, Volksen, Willi, Spooner, Terry, Shobha, Hosadurga, Joe Lee, Chen, James Hsueh-Chung, Magbitang, Teddie, Peethala, Brown, Liniger, Eric G., Chao Kun Hu, Huang, Elbert, Canaperi, Donald F., Standaert, Theodorus E., Edelstein, Daniel C., Grill, Alfred, Dubois, Geraud, Bonilla, Griselda

“…Integration of high porosity low-k dielectrics faces major challenges as the porosity weakens the dielectric, resulting in severe plasma induced damage (PID)…”
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