Search Results - "Greek, Staffan"

Deflection of surface-micromachined devices due to internal, homogeneous or gradient stresses by Greek, Staffan, Chitica, Nicolae

“…Devices surface-micromachined out of a thin film containing an internal stress will be deformed upon release. The stress of a film can be approximated in…”
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In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures by Greek, Staffan, Ericson, Fredric, Johansson, Stefan, Schweitz, Jan-Åke

“…A method is introduced in which tensile tests can be performed in situ on micromachined structures. The testing equipment consists of a testing unit mounted on…”
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Mechanical considerations in the design of a micromechanical tuneable InP-based WDM filter by Greek, S., Gupta, R., Hjort, K.

“…A WDM photodetector for fiberoptic communication systems using a wavelengths around 1.55 /spl mu/m has earlier been proposed as a tuneable Fabry-Perot…”
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The strength of surface micromachined indium phosphide devices evaluated by Weibull analysis of tensile and bending tests by GREEK, S, SEASSAL, C, VIKTOROVITCH, P, HJORT, K

“…The strength of beams surface micromachined from InP was evaluated by subjecting the beams to bending and tensile tests. The tests were performed with a…”
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Fabrication of tunable InP/air-gap Fabry-Perot cavities by selective etching of InGaAs sacrificial layers by Chitica, Nicolae, Daleiden, Jürgen, Bentell, Jonas, André, Janos, Strassner, Martin, Greek, Staffan, Pasquariello, Donato, Karlsson, Mikael, Gupta, Ram, Hjort, Klas

“…We report the fabrication of InP/air-gap Fabry-Perot resonant cavities with an improved tunability characteristic achieved through the micromachining of more…”
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