Search Results - "Gosmeyer, C.D."
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Development of the self-aligned titanium silicide process for VLSI applications
Published in IEEE transactions on electron devices (01-02-1985)“…A manufacturable self-aligned titanium silicide process which simultaneously silicides both polysilicon gates and junctions has been developed for VLSI…”
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Journal Article -
2
Development of the Self-Aligned Titanium Silicide Process for VLSI Applications
Published in IEEE journal of solid-state circuits (01-02-1985)“…A manufacturable self-aligned titanium silicide process which simultaneously silicides both polysilicon gates and junctions has been developed for VLSI…”
Get full text
Journal Article -
3
VB-1 a VLSI suitable 2-µm stacked CMOS process
Published in IEEE transactions on electron devices (01-12-1984)Get full text
Journal Article