Search Results - "Gosmeyer, C.D."

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    Development of the self-aligned titanium silicide process for VLSI applications by Alperin, M.E., Holloway, T.C., Haken, R.A., Gosmeyer, C.D., Karnaugh, R.V., Parmantie, W.D.

    Published in IEEE transactions on electron devices (01-02-1985)
    “…A manufacturable self-aligned titanium silicide process which simultaneously silicides both polysilicon gates and junctions has been developed for VLSI…”
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    Journal Article
  2. 2

    Development of the Self-Aligned Titanium Silicide Process for VLSI Applications by Alperin, M.E., Hollaway, T.C., Haken, R.A., Gosmeyer, C.D., Karnaugh, R.V., Parmantie, W.D.

    Published in IEEE journal of solid-state circuits (01-02-1985)
    “…A manufacturable self-aligned titanium silicide process which simultaneously silicides both polysilicon gates and junctions has been developed for VLSI…”
    Get full text
    Journal Article
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