Search Results - "Goodyear, Andrew L."

Irregular film thickness distribution in C4F8 inductively coupled plasma polymer deposition by Volland, Burkhard E., Hauguth, Maik, Ishchuk, Valentyn, Rangelow, Ivo W., Goodyear, Andrew L.

“…[Display omitted] ► Enlargement of initial sidewall texture in the shape of the deposited plasma polymer film. ► Modified activated growth model (M-AGM): Ion…”
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Thin film processing using S-layer proteins: Biotemplated assembly of colloidal gold etch masks for fabrication of silicon nanopillar arrays by Mark, Sonny S., Bergkvist, Magnus, Bhatnagar, Parijat, Welch, Colin, Goodyear, Andrew L., Yang, Xin, Angert, Esther R., Batt, Carl A.

“…We explored the bionanofabrication of silicon nanopillar structures using ordered gold nanoparticle arrays generated from microbial surface layer (S-layer)…”
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High resolution inductively coupled plasma etching of 30 nm lines and spaces in tungsten and silicon by Goodyear, Andrew L., Mackenzie, Sinclair, Olynick, Deirdre L., Anderson, Erik H.

“…Dry etching of 30 nm features was investigated for x-ray and integrated electronics applications. These typically require etching of either a tungsten absorber…”
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