Search Results - "Gond, Vinita"
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Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements
Published in Microsystem technologies : sensors, actuators, systems integration (01-03-2020)“…This paper discusses the evaluation and testing of MEMS capacitive accelerometer (z-axis sensitive) fabricated using silicon-on-insulator (SOI) wafer. The…”
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Journal Article -
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Fabrication of spiral inter-digitated terminal (IDT) structure of electroplated gold on quartz substrate and progressive microplasma generation
Published in Journal of materials science. Materials in electronics (01-02-2018)“…This paper discussed about the progressive microplasma generation in planar spiral inter-digitated terminal (IDT) structure. The IDT structures (with…”
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Journal Article