Search Results - "Godoy Fo, J."
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Titanium nitride as electrode for MOS technology and Schottky diode: Alternative extraction method of titanium nitride work function
Published in Microelectronic engineering (01-04-2012)“…Titanium nitride (TiN) films have been used as gate electrodes in metal–oxide-semiconductor (MOS) capacitors, which were fabricated with SiO2 layer as gate…”
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Journal Article Conference Proceeding -
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Characteristics of Silicon Oxide Gate MOS Capacitors Formed by Rapid Thermal Oxidation and Annealing
Published in 2007 15th International Conference on Advanced Thermal Processing of Semiconductors (01-10-2007)“…Ultra-thin silicon oxide (SiO 2 ) insulating films have been obtained by rapid thermal oxidation (RTO) and annealing (RTA), using different temperatures of…”
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Conference Proceeding