Electrical characterization of sol-gel derived PZT thin films

Thin films of lead zirconate titanate (PZT) were deposited on a variety of substrates using the sol-gel process. These included Pt/Ti/SiO/sub 2//Si, RuO/sub 2//SiO/sub 2//Si, RuO/sub 2//MgO, Pt/MgO, and Pt/Ti/MgO. Epitaxial, oriented, and polycrystalline films were obtained after annealing at 700 de...

Full description

Bibliographic Details

Published in:	ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics pp. 448 - 451
Main Authors:	Bellur, K.R., Al-Shareef, H.N., Rou, S.H., Gifford, K.D., Auciello, O., Kingon, A.I.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 1992
Subjects:	Annealing Electrodes Fatigue Hysteresis Polarization Semiconductor films Sputtering Substrates Titanium compounds Transistors
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!