Search Results - "Gebel, Thoralf"
-
1
P-65: Advanced Processing of ITO and IZO Thin Films on Flexible Glass
Published in SID International Symposium Digest of technical papers (01-06-2015)“…Ultra‐thin 100µm thick flexible glasses with a maximum dimension of 250×300 mm2 were deposited with transparent conductive ITO and IZO using in‐line magnetron…”
Get full text
Journal Article -
2
Ultra-shallow junctions produced by plasma doping and flash lamp annealing
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15-12-2004)“…The capabilities of plasma doping (PLAD) and flash lamp annealing (FLA) for use in ultra-shallow junction (USJ) fabrication have been evaluated. Silicon wafers…”
Get full text
Journal Article