Search Results - "Gardner, Ethan L. W."
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1
Micromachined Thermal Gas Sensors-A Review
Published in Sensors (Basel, Switzerland) (06-01-2023)“…In recent years, there has been a growing desire to monitor and control harmful substances arising from industrial processes that impact upon our health and…”
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Journal Article -
2
MEMS Thermal Flow Sensors- An Accuracy Investigation
Published in IEEE sensors journal (15-04-2019)“…The geometric structure of a low-power thermal micro-hot film sensor has been investigated and optimized, using both computational and experimental methods…”
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Journal Article -
3
Simultaneous Flow and Thermal Conductivity Sensing on a Single Chip Using Artificial Neural Networks
Published in IEEE sensors journal (01-05-2020)“…A thin-film CMOS MEMS thermal sensor has been designed, fabricated and tested with the addition of through-membrane isolating holes. These holes have been…”
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Journal Article -
4
Adaptive 3-Mode Thermal Flow and Velocity Sensor
Published in 2023 IEEE SENSORS (29-10-2023)“…A fully programmed, adaptive flow sensor system has been designed, simulated, manufactured and tested. A 3-mode drive and read-out method is proposed…”
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Conference Proceeding -
5
Thermal Conductivity Sensor with Isolating Membrane Holes
Published in 2019 IEEE SENSORS (01-10-2019)“…In this paper we present a thermal conductivity gas sensor with improved sensitivity by adding holes in the thin-film membrane. A numerical model is created…”
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Conference Proceeding -
6
Thin-Film MOSFET-Based Pressure Sensor
Published in IEEE sensors letters (01-07-2019)“…This article proposes a silicon-on-insulator complementary metal-oxide semiconductor (CMOS) micro-electromechanical system (MEMS) thin-film pressure sensor in…”
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Journal Article -
7
Membrane Deflection and Stress in Thermal Flow Sensors
Published in Proceedings (01-12-2018)“…The effect of membrane deflection has been investigated for thermal flow sensors. Catastrophic membrane breakage is a common occurrence in membrane based…”
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Journal Article -
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2D and 3D thermal flow sensor modelling - A comparative analysis
Published in 2017 International Semiconductor Conference (CAS) (01-10-2017)“…In this paper, 2-Dimensional and 3-Dimensional numerical models of a thermal flow sensor are discussed and compared against one another whilst being validated…”
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Conference Proceeding -
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Differential Thermal Conductivity CO2 Sensor
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25-01-2021)“…In this paper we present a novel MEMS technology for CO 2 detection, based on differential thermal conductivity. Holes have been positioned across the…”
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Conference Proceeding -
10
Diode-based CMOS MEMS thermal flow sensors
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01-06-2017)“…This paper reports on the intrinsic advantages of thermoelectronic flow sensors in comparison to their thermoresistive and thermoelectric counterparts…”
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Conference Proceeding -
11
Comparison of Thermo-Resistive and Thermo-Electronic Transduction Methods in Thermal Flow Sensors
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01-06-2019)“…This paper investigates the differences between thermo-resistive and thermo-electronic flow sensors across 5 SOI CMOS designs. The two transduction principles…”
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Conference Proceeding