Search Results - "Garcia, Inês S."

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography by Garcia, Ines S., Ferreira, Carlos, Santos, Joana D., Martins, Marco, Dias, Rosana A., Aguiam, Diogo E., Cabral, Jorge, Gaspar, Joao

“…A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on vertically asymmetric comb-drive electrostatic actuators, is presented in…”
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CHARMIE: A Collaborative Healthcare and Home Service and Assistant Robot for Elderly Care by Ribeiro, Tiago, Gonçalves, Fernando, Garcia, Inês S., Lopes, Gil, Ribeiro, António F.

“…The global population is ageing at an unprecedented rate. With changes in life expectancy across the world, three major issues arise: an increasing proportion…”
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Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds by Cunha, Joao, Garcia, Inês S., Santos, Joana D., Fernandes, José, González-Losada, Pedro, Silva, Carlos, Gaspar, João, Cortez, Ana, Sampaio, Marcos, Aguiam, Diogo E.

“…Direct Write Laser (DWL) Grayscale (GS) lithography has gathered attention as a versatile technological solution to fabricate arbitrary and complex 2.5D…”
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Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography by Aguiam, Diogo E., Santos, Joana D., Silva, Carlos, Gentile, Fabio, Ferreira, Carlos, Garcia, Inês S., Cunha, Joåo, Gaspar, João

“…Diffractive lenses can replicate the optical functions of their refractive counterparts using an equivalent surface relief phase profile, enabling more compact…”
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Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers by Garcia, Inês S., Fernandes, José, Queiroz, José B., Calaza, Carlos, Moreira, José, Dias, Rosana A., Alves, Filipe S.

“…This work presents a micromachining process that allows the creation of hierarchical, matryoshka-like MEMS structures that can be used for multi-axis sensing…”
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Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer by Garcia, Inês S., Retolaza, Aritz, Ferreira, Carlos, Silva, Carlos, Aguiam, Diogo E., Alves, Filipe S., Sousa, Patrícia C., Dias, Rosana A., Cabral, Jorge, Gaspar, João

“…In this work a multilevel nanoimprint lithography (NIL) replication process was demonstrated to produce 1D MEMS mirrors employing vertical asymmetric…”
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Double-Proof Mass SOI-Based Matryoshka-Like 3-Axis MEMS Accelerometer by Garcia, Ines S., Fernandes, Jose, Queiroz, Jose B., Calaza, Carlos, Moreira, Jose, Dias, Rosana A., Alves, Filipe S.

“…MEMS accelerometers have been around for many years and became a key element to different applications, such as inertial navigation, or geophysical sensing…”
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Ultra-High Sensitivity Pull-In Time Mems Accelerometer for Satellite Gravimetry by Garcia, Ines S., Santos, Dimitri E., Queiroz, Jose B., Da Encarnacao, Joao T., Hormigo, Tiago, Cabral, Jorge, Alves, Filipe S., Dias, Rosana A.

“…Satellite gravimetry applications require sub-ng acceleration resolution at frequencies below 100 mHz, demanding low-noise (mechanical-thermal, 1/f and…”
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Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction by Garcia, Ines S., Moreira, Eurico E., Dias, Rosana A., Gaspar, Joao, Alves, Filipe S., Rocha, Luis A.

“…A very high-resolution SOI (silicon-on-insulator) MEMS (Micro-Electro-Mechanical Systems) accelerometer for geodetic space grade applications using pull-in…”
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