A compact serial RF MEMS switch for S-band application

This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB i...

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Bibliographic Details
Published in:	2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Vol. 2; pp. 733 - 738 vol.2
Main Authors:	Hu Xiaodong, Lumiao, Hou Maohui, He Qingguo, Gao Cuizhuo, Bai Xiwei, Zhao Zhengping
Format:	Conference Proceeding
Language:	English
Published:	IEEE 2001
Subjects:	Bridge circuits Contacts Dielectric losses Insertion loss Radio frequency Radiofrequency microelectromechanical systems Resistors Resonance Switches Voltage
Online Access:	Get full text
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Summary:	This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.
ISBN:	0780365208 9780780365209
DOI:	10.1109/ICSICT.2001.981999