Search Results - "Galeazzo, E."
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1
Gas sensitive porous silicon devices: responses to organic vapors
Published in Sensors and actuators. B, Chemical (01-08-2003)“…Geometrically scaled PS-based structures were fabricated in order to develop gas sensing devices by exploring porous silicon (PS) electrical characteristics…”
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Journal Article -
2
Silicon Field-Emission Devices Fabricated Using the Hydrogen Implantation-Porous Silicon (HI-PS) Micromachining Technique
Published in Journal of microelectromechanical systems (01-10-2008)“…This paper presents a relatively simple method to fabricate field-emitter arrays from silicon substrates. These devices are obtained from silicon…”
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Journal Article -
3
Use of plasma polymerized highly hydrophobic hexamethyldissilazane (HMDS) films for sensor development
Published in Sensors and actuators. B, Chemical (01-06-2003)“…Hexamethyldissilazane (HMDS) plasma polymerized films can be used in a wide variety of applications due to the facility on plasma polymerization of HMDS…”
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Journal Article -
4
Use of plasma polymerized highly polar organic compound films for sensor development
Published in Sensors and actuators. B, Chemical (01-06-2003)“…This work made use of cleaner technologies and environmental friendly reagents to produce polar organic films with adsorption properties to be used as sensors…”
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Journal Article -
5
HI–PS technique for MEMS fabrication
Published in Sensors and actuators. A. Physical. (21-09-2004)“…This work presents the results obtained by mean of a promising procedure for silicon-based MEMS fabrication named hydrogen ion implantation–porous silicon…”
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Journal Article -
6
Silicon micromechanical structures fabricated by electrochemical process
Published in IEEE sensors journal (01-12-2003)“…Silicon micromechanical structures were fabricated by means of sacrificial layers defined with porous silicon and masked by hydrogen ion implantation with…”
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Journal Article Conference Proceeding -
7
Silicon Field-Emission Devices Fabricated Using the Hydrogen ImplantationaPorous Silicon (HIaPS) Micromachining Technique
Published in Journal of microelectromechanical systems (01-01-2008)“…This paper presents a relatively simple method to fabricate field-emitter arrays from silicon substrates. These devices are obtained from silicon…”
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Journal Article -
8
Porous silicon patterned by hydrogen ion implantation
Published in Sensors and actuators. B, Chemical (01-06-2001)“…This work presents some results on a new combination of process techniques in order to obtain patterning for porous silicon (PS) formation over silicon wafers…”
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Journal Article -
9
Silicon micromechanical structures fabricated by electrochemical process
Published in Proceedings of IEEE Sensors (2002)“…Silicon (Si) micromechanical structures were fabricated by means of sacrificial layers defined with porous silicon (PS) and masked by hydrogen ion implantation…”
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Conference Proceeding