Search Results - "Gagaeva, Alina E."

Development of controlled nanosphere lithography technology by Osipov, Artem A., Gagaeva, Alina E., Speshilova, Anastasiya B., Endiiarova, Ekaterina V., Bespalova, Polina G., Osipov, Armenak A., Belyanov, Ilya A., Tyurikov, Kirill S., Tyurikova, Irina A., Alexandrov, Sergey E.

“…This work is devoted to the development of nanosphere lithography (NSL) technology, which is a low-cost and efficient method to form nanostructures for…”
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OES diagnostics as a universal technique to control the Si etching structures profile in ICP by Osipov, Artem A., Iankevich, Gleb A., Speshilova, Anastasia B., Gagaeva, Alina E., Osipov, Armenak A., Enns, Yakov B., Kazakin, Alexey N., Endiiarova, Ekaterina V., Belyanov, Ilya A., Ivanov, Viktor I., Alexandrov, Sergey E.

“…In this work, we demonstrate the high efficiency of optical emission spectroscopy to estimate the etching profile of silicon structures in SF 6 /C 4 F 8 /O 2…”
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Highly Selective Plasma Etching Technique for Molybdenum by Osipov, Artem A., Andrianov, Nikolai A., Speshilova, Anastasia B., Gagaeva, Alina E., Risquez, Sarah, Vorobyev, Alexandr, Alexandrov, Sergey E.

“…This work presents the results of the study of plasma-chemical etching of molybdenum in SF 6 inductively coupled plasma using a photoresist mask. The…”
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