Search Results - "GROBER, L. H"
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1
In-situ process for AlGaAs compound semiconductor : materials science and device fabrication
Published in Journal of electronic materials (01-07-1994)“…Title describes article content…”
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Conference Proceeding Journal Article -
2
Buried heterostructure laser diodes fabricated using in situ processing
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-03-1994)“…An in situ process which includes electron cyclotron resonance plasma etching and molecular beam epitaxial regrowth is applied to the fabrication of buried…”
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Conference Proceeding Journal Article -
3
Interface analysis of dry etched and molecular beam epitaxial regrown AlGaAs
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-03-1994)“…Many novel optoelectronic devices can be realized by the technique of molecular beam epitaxy regrowth on etched surfaces. A smooth etched surface free from…”
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Conference Proceeding Journal Article