Search Results - "GOONETILLEKE, P. C"

Relative roles of acetic acid, dodecyl sulfate and benzotriazole in chemical mechanical and electrochemical mechanical planarization of copper by Goonetilleke, P.C., Roy, D.

“…The efficiency of chemical mechanical or electrochemical mechanical planarization (CMP or ECMP) carried out in the fabrication of integrated circuits is…”
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Probing the electrochemical double layer of an ionic liquid using voltammetry and impedance spectroscopy: A comparative study of carbon nanotube and glassy carbon electrodes in [EMIM] +[EtSO 4] by Zheng, J.P., Goonetilleke, P.C., Pettit, C.M., Roy, D.

“…Cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) are compared as techniques for analyzing double layer capacitances of ionic liquids…”
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Electrochemical–mechanical planarization of copper: Effects of chemical additives on voltage controlled removal of surface layers in electrolytes by Goonetilleke, P.C., Roy, D.

“…Chemical–mechanical planarization (CMP) of copper has now become an integral part of materials processing in the fabrication of integrated circuits. This…”
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D.C. voltammetry of ionic liquid-based capacitors : Effects of Faradaic reactions, electrolyte resistance and voltage scan speed investigated using an electrode of carbon nanotubes in EMIM-EtSO4 by ZHENG, J. P, PETTIT, C. M, GOONETILLEKE, P. C, ZENGER, G. M, ROY, D

“…Carbon nanotube (CNT) electrodes in combination with ionic liquid (IL) electrolytes are potentially important for energy storage systems. We report…”
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Combining Impedance Spectroscopy with Cyclic Voltammetry:  Measurement and Analysis of Kinetic Parameters for Faradaic and Nonfaradaic Reactions on Thin-Film Gold by Pettit, C. M, Goonetilleke, P. C, Sulyma, C. M, Roy, D

“…The technique of time-resolved impedance spectroscopy can be combined with dc cyclic voltammetry (CV) to study mechanisms and kinetics of electrochemical…”
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Analysis of current transients for voltage pulse-modulated surface processing: Application to anodic electro-dissolution of copper for electrochemical mechanical planarization by Sulyma, C.M., Goonetilleke, P.C., Roy, D.

“…The voltage pulse modulation technique is useful for electrochemical processing of metal and alloy surfaces by utilizing faradaic reactions like…”
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Voltage pulse-modulated electrochemical removal of copper surface layers using citric acid as a complexing agent by Goonetilleke, P.C., Roy, D.

“…Voltage induced removal of surface layers from wiring lines is an essential component of the electrochemical mechanical planarization (ECMP) technique used for…”
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Measurement of differential capacitance for faradaic systems under potentiodynamic conditions: Considerations of Fourier transform and phase-selective techniques by Pettit, C.M., Goonetilleke, P.C., Roy, D.

“…The differential capacitance ( C diff) technique is widely employed in studies of metal–liquid interfaces, and is particularly useful for probing…”
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Probing the electrochemical double layer of an ionic liquid using voltammetry and impedance spectroscopy: A comparative study of carbon nanotube and glassy carbon electrodes in [EMIM] super(+)[EtSO sub(4)] super(-) by Zheng, J P, Goonetilleke, P C, Pettit, C M, Roy, D

“…Cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) are compared as techniques for analyzing double layer capacitances of ionic liquids…”
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