A deceleration system at the Heidelberg EBIT providing very slow highly charged ions for surface nanostructuring

Recently, it has been demonstrated that each single-impact of a slow (typically 1–2 keV/u) highly charged ion (HCI) creates truly topographic and non-erasable nanostructures on CaF 2 surfaces. To further explore the possibility of nanostructuring various surfaces, using mainly the potential energy s...

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Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 268; no. 19; pp. 2972 - 2976
Main Authors: Ginzel, R., Higgins, S.G., Mrowcynski, P., Northway, P., Simon, M.C., Tawara, H., Crespo López-Urrutia, J.R., Ullrich, J., Kowarik, G., Ritter, R., Meissl, W., Vasko, C., Gösselsberger, C., El-Said, A.S., Aumayr, F.
Format: Journal Article
Language:English
Published: Elsevier B.V 01-10-2010
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Summary:Recently, it has been demonstrated that each single-impact of a slow (typically 1–2 keV/u) highly charged ion (HCI) creates truly topographic and non-erasable nanostructures on CaF 2 surfaces. To further explore the possibility of nanostructuring various surfaces, using mainly the potential energy stored in such HCIs, projectiles with kinetic energies as low as possible are required. For this purpose a new apparatus, capable of focusing and decelerating an incoming ion beam onto a solid or gaseous target, has been installed at the Heidelberg electron beam ion trap (EBIT). An X-ray detector and a position-sensitive particle detector are utilized to analyze the beam and collision products. First experiments have already succeeded in lowering the kinetic energy of HCIs from 10 keV/q, down to ∼30 eV/q, and in focusing the decelerated beam to spot sizes of less than 1 mm 2, while maintaining the kinetic energy spread below ∼20 eV/q.
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ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2010.05.020