Search Results - "Fritzinger, L."
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Reverse L-shape sealed poly-buffer LOCOS technology
Published in IEEE electron device letters (01-11-1990)“…A description is presented of a new LOCOS (local oxidation of silicon) isolation process, reverse-L-shaped sealed poly-buffer LOCOS (RLS-PBL), which can…”
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Journal Article -
2
A folded extended window MOSFET for ULSI applications
Published in IEEE electron device letters (01-08-1988)“…A novel, simple, and straightforward technology, FEWMNOS, for a high-packing-density LDD CMOS device, is described. A salicide polysilicon layer, termed a…”
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Journal Article -
3
COM2 SiGe modular BiCMOS technology for digital, mixed-signal, and RF applications
Published in International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) (2000)“…The COM2 SiGe modular BiCMOS technology has been developed to allow efficient design and manufacturing of digital, mixed-signal, and RF integrated circuits, as…”
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Conference Proceeding -
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Integration of poly buffered LOCOS and gate processing for submicrometer isolation technique
Published in IEEE transactions on electron devices (01-12-1991)“…A modified poly buffered LOCOS (PBL) process is described which simplifies processing and provides advantages over conventional PBL and LOCOS processes. The…”
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Journal Article -
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A low-cost modular SiGe BiCMOS technology and analog passives for high-performance RF and wide-band applications
Published in Proceedings of the 2000 BIPOLAR/BiCMOS Circuits and Technology Meeting (Cat. No.00CH37124) (2000)“…We present a low-cost 0.25 /spl mu/m SiGe BiCMOS technology that is being manufactured in an 8-inch production line. The technology includes modules for…”
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Conference Proceeding -
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An Integrated Isolation/Gate Process For Sub-quarter Micron Technologies
Published in Symposium 1993 on VLSI Technology (1993)“…We have demonstrated the feasibility of a novel process in which the oxide/poly stack used in poly buffer LOCOS (PBL) is the same as the oxide/poly of the…”
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Conference Proceeding -
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25 /spl Aring/ gate oxide without boron penetration for 0.25 and 0.3-/spl mu/m PMOSFETs
Published in 1996 Symposium on VLSI Technology. Digest of Technical Papers (1996)“…Very thin gate oxides are necessary for small CMOS transistors. However, one major challenge is boron penetration through the thin gate oxides in…”
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Conference Proceeding