Search Results - "Freidhoff, C B"

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  1. 1

    Residual stress development in Pb(Zr,Ti)O3/ZrO2/SiO2 stacks for piezoelectric microactuators by HONG, E, SMITH, R, KRISHNASWAMY, S. V, FREIDHOFF, C. B, TROLIER-MCKINSTRY, S

    Published in Thin solid films (03-07-2006)
    “…The residual stress of multilayers in piezoelectric microelectromechanical systems structures influences their electromechanical properties and performance…”
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    Journal Article
  2. 2

    Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes by Hong, Eunki, Krishnaswamy, S.V., Freidhoff, C.B., Trolier-McKinstry, S.

    Published in Sensors and actuators. A. Physical. (13-04-2005)
    “…Piezoelectric diaphragms actuated by interdigitated transducer (IDT) electrodes were fabricated by bulk micromachining. To fabricate the diaphragms, a Si wafer…”
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    Journal Article
  3. 3

    Outgassing properties of a commercial fiber fabric material for high temperature use in high vacuum by Sinharoy, S., Lange, W. J., Freidhoff, C. B.

    “…The outgassing properties of baked and unbaked NextelTM 440 (style BF–30) ceramic fiber fabrics manufactured by the 3M company have been measured to determine…”
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    Journal Article
  4. 4

    Chemical sensing using nonoptical microelectromechanical systems by Freidhoff, C. B., Young, R. M., Sriram, S., Braggins, T. T., O'Keefe, T. W., Adam, J. D., Nathanson, H. C., Syms, R. R. A., Tate, T. J., Ahmad, M. M., Taylor, S., Tunstall, J.

    “…Micromachining is a technology that miniaturizes mechanical sensors and actuators through the use of tools and materials commonly used in the integrated…”
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    Conference Proceeding Journal Article
  5. 5

    Numerical Modeling of a Circularly Interdigitated Piezoelectric Microactuator by Myers, O J, Anjanappa, M, Freidhoff, C B

    Published in Journal of microelectromechanical systems (01-10-2010)
    “…Accurate modeling and simulation techniques are vital for actuated membranes. Using multiphysical modeling techniques, coupled with variation in design…”
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    Journal Article
  6. 6

    Design of MEMS PZT circular diaphragm actuators to generate large deflections by Eunki Hong, Trolier-McKinstry, S., Smith, R.L., Krishnaswamy, S.V., Freidhoff, C.B.

    Published in Journal of microelectromechanical systems (01-08-2006)
    “…This paper presents a design of lead zirconate titanate (PZT) circular diaphragm actuators to generate large deflections. The actuators utilize a unimorph…”
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    Journal Article
  7. 7
  8. 8

    Vibration of micromachined circular piezoelectric diaphragms by HONG, Eunki, TROLIER-MCKINSTRY, Susan, SMITH, Robert, KRISHNASWAMY, Silai V, FREIDHOFF, Carl B

    “…Electrically and mechanically excited resonances in micromachined circular piezoelectric diaphragms have been investigated. The diaphragm structures were…”
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    Journal Article
  9. 9

    Vibration of micromachined circular piezoelectric diaphragms by Eunki Hong, Trolier-McKinstry, S., Smith, R., Krishnaswamy, S.V., Freidhoff, C.B.

    “…The electrically and mechanically excited resonances in micromachined circular piezoelectric diaphragms have been investigated. The diaphragm structures were…”
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    Journal Article
  10. 10
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  12. 12

    Analysis of intra-level isolation test structure data by multiple regression facilitate rule identification for diagnostic expert systems by Freidhoff, C.B., Cresswell, M.W., Lowry, L.R., Irani, K.B.

    “…It is shown that multiple regression analysis of data from test structures designed to evaluate VLSI fabrication processes for multilevel interconnects can…”
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    Conference Proceeding