Search Results - "Freidhoff, C B"
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Residual stress development in Pb(Zr,Ti)O3/ZrO2/SiO2 stacks for piezoelectric microactuators
Published in Thin solid films (03-07-2006)“…The residual stress of multilayers in piezoelectric microelectromechanical systems structures influences their electromechanical properties and performance…”
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Journal Article -
2
Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes
Published in Sensors and actuators. A. Physical. (13-04-2005)“…Piezoelectric diaphragms actuated by interdigitated transducer (IDT) electrodes were fabricated by bulk micromachining. To fabricate the diaphragms, a Si wafer…”
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Journal Article -
3
Outgassing properties of a commercial fiber fabric material for high temperature use in high vacuum
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-03-1990)“…The outgassing properties of baked and unbaked NextelTM 440 (style BF–30) ceramic fiber fabrics manufactured by the 3M company have been measured to determine…”
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4
Chemical sensing using nonoptical microelectromechanical systems
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-07-1999)“…Micromachining is a technology that miniaturizes mechanical sensors and actuators through the use of tools and materials commonly used in the integrated…”
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Conference Proceeding Journal Article -
5
Numerical Modeling of a Circularly Interdigitated Piezoelectric Microactuator
Published in Journal of microelectromechanical systems (01-10-2010)“…Accurate modeling and simulation techniques are vital for actuated membranes. Using multiphysical modeling techniques, coupled with variation in design…”
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Journal Article -
6
Design of MEMS PZT circular diaphragm actuators to generate large deflections
Published in Journal of microelectromechanical systems (01-08-2006)“…This paper presents a design of lead zirconate titanate (PZT) circular diaphragm actuators to generate large deflections. The actuators utilize a unimorph…”
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7
Photoelectron spectroscopy of selenium- and tellurium-containing negative ions: SeO2-, Se2-, and Te2
Published in Journal of physical chemistry (1952) (01-02-1989)Get full text
Journal Article -
8
Vibration of micromachined circular piezoelectric diaphragms
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-04-2006)“…Electrically and mechanically excited resonances in micromachined circular piezoelectric diaphragms have been investigated. The diaphragm structures were…”
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Journal Article -
9
Vibration of micromachined circular piezoelectric diaphragms
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-04-2006)“…The electrically and mechanically excited resonances in micromachined circular piezoelectric diaphragms have been investigated. The diaphragm structures were…”
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Journal Article -
10
Low-loss bandpass RF filter using MEMS capacitance switches to achieve a one-octave tuning range and independently variable bandwidth
Published in IEEE MTT-S International Microwave Symposium Digest, 2003 (2003)“…We demonstrate a low insertion loss (1.5dB) tunable two-pole bandpass radio frequency filter with a tuning range of one octave (812-1752 MHz). It is also…”
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Conference Proceeding -
11
Photoelectron spectroscopy of selenium- and tellurium-containing negative ions: Se2-, Se2-, and Te2
Published in Journal of physical chemistry (1952) (1989)Get full text
Journal Article -
12
Analysis of intra-level isolation test structure data by multiple regression facilitate rule identification for diagnostic expert systems
Published in Proceedings of the 1989 International Conference on Microelectronic Test Structures (1989)“…It is shown that multiple regression analysis of data from test structures designed to evaluate VLSI fabrication processes for multilevel interconnects can…”
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Conference Proceeding