Search Results - "Forke, Roman"

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride by Meinel, Katja, Melzer, Marcel, Stoeckel, Chris, Shaporin, Alexey, Forke, Roman, Zimmermann, Sven, Hiller, Karla, Otto, Thomas, Kuhn, Harald

“…A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic…”
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Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors by Stoeckel, Chris, Meinel, Katja, Melzer, Marcel, Žukauskaitė, Agnė, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Kuhn, Harald

“…Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al Sc N) are presented and compared regarding their static deflection…”
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Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride by Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas

“…A micromirror with piezoelectric thin film aluminum nitride (AIN) as transducer material for actuation and detection is presented. Four sensor elements are…”
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Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride by Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas

“…A micromirror with piezoelectric thin film aluminum nitride (AlN) as transducer material for actuation and detection is presented. Four sensor elements are…”
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Piezoelectric P(VDF-TrFE) transducers assembled with micro injection molded polymers by Schulze, Robert, Heinrich, Michael, Nossol, Patryk, Forke, Roman, Sborikas, Martynas, Tsapkolenko, Alexander, Billep, Detlef, Wegener, Michael, Kroll, Lothar, Gessner, Thomas

“…•A polymer-based accelerometer has been designed, manufactured and characterized.•The accelerometer has a sensitivity of 0.69pC/g and a resonance frequency of…”
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Measurement unit for tunable low frequency vibration detection with MEMS force coupled oscillators by Forke, Roman, Scheibner, Dirk, Dötzel, Wolfram, Mehner, Jan

“…This paper reports on the measurement unit of a micromechanical sensor–actuator system for adjustable frequency selective vibration detection in the frequency…”
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Electrostatic force coupling of MEMS oscillators for spectral vibration measurements by Forke, Roman, Scheibner, Dirk, Mehner, Jan E., Gessner, Thomas, Dötzel, Wolfram

“…Within this paper we present a new microsystem for frequency selective vibration monitoring in the frequency range below 1 kHz. The novel sensor is based on…”
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Fabrication and characterization of a force coupled sensor–actuator system for adjustable resonant low frequency vibration detection by Forke, Roman, Scheibner, Dirk, Hiller, Karla, Gessner, Thomas, Dötzel, Wolfram, Mehner, Jan

“…Micromechanical resonators for vibration sensing are typically limited to frequencies above 1kHz [D. Scheibner, J. Mehner, D. Reuter, T. Gessner, W. Dötzel, A…”
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Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope by Forke, Roman, Shaporin, Alexey, Weidlich, Sebastian, Bulz, Daniel, Hiller, Karla, Kuhn, Harald

“…Within this paper we report on a new efficient shape of comb electrodes for the use in DC quadrature compensation. With the help of finite element (FE)…”
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Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes by Forke, Roman, Tsukamoto, Takashiro, Shaporin, Alexey, Weidlich, Sebastian, Bulz, Daniel, Hahn, Susann, Tanaka, Shuji, Hiller, Karla

“…Within this paper we report on our development from a MEMS vibrating tuning fork gyroscope to a ring gyroscope with additional comb electrodes for enhanced…”
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High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity by Tsukamoto, Takashiro, Forke, Roman, Weidlich, Sebastian, Bulz, Daniel, Shaporin, Alexey, Hiller, Karla, Tanaka, Shuji

“…In this paper, we propose a resonator for a mode-localization sensor that offers high and adjustable sensitivity. Two oscillation modes of a fully symmetrical…”
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Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations by Tsukamoto, Takashiro, Forke, Roman, Weidlich, Sebastian, Bulz, Daniel, Shaporin, Alexey, Hiller, Karla, Tanaka, Shuji

“…This paper reports on a mode-localized sensor that uses superposed in-phase (IP) and anti-phase (AP) oscillation modes. The IP/AP mode separator was developed…”
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Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements by Shaporin, Alexey, Stockel, Chris, Melzer, Marcel, Schaller, Falk, Forke, Roman, Zimmermann, Sven, Kuhn, Harald

“…In this paper a concept of nanoionic memory based zero energy system for vibration monitoring is presented. The system operates an fulfill their measuring…”
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Modular Probecard-Measurement Equipment for Automated Wafer-Level Characterization of High Precision MEMS Gyroscopes by Weidlich, Sebastian, Forke, Roman, Hiller, Karla, Bulz, Daniel, Shaporin, Alexey, Kuhn, Harald

“…In this contribution we introduce and describe three electronics for MEMS and ASIC testing. With them it is possible to select best working MEMS- and ASIC dies…”
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Vibration sensors with a high bandwidth and low SNR, enhanced with post processing gap reduction by Streit, Petra, Forke, Roman, Voigt, Sven, Schwarz, Uwe, Ziegenhardt, Roman, Weidlich, Sebastian, Billep, Detlef, Gaitzsch, Markus, Kuhn, Harald

“…Vibration sensors require a high sensitivity; however the fabrication process is limited by minimum gap size due to design rules. FhG ENAS and X-FAB MEMS…”
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Design, Fabrication and Characterization of High-G Acceleration Sensors for Automotive Industry and Test Structures for the Process Characterization by Shaporin, Alexey, Weidlich, Sebastian, Wunsch, Dirk, Hahn, Susann, Forke, Roman, Hiller, Karla, Kuhn, Harald

“…This paper is dedicated to the development of high-g acceleration sensors for automotive industry. Most of our designed sensors target the common measurement…”
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Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride by Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas

“…In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated…”
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Simulation of Self-Heating of Printed Interconnects for Thermal Design by Bulz, Daniel, Streit, Petra, Forke, Roman, Otto, Thomas

“…Self-heating of electric components is an important design criterion for electronic circuits. Using additive manufacturing processes like low temperature…”
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Compact Standalone North-finding Device based on MEMS Gyroscope and Maytagging by Bulz, Daniel, Weidlich, Sebastian, Konietzka, Stefan, Motl, Tim, Shaporin, Alexey, Forke, Roman, Hiller, Karla, Kuhn, Harald

“…North-finders based on gyroscopes are commonly used because of their robustness against local Earth magnetic field distortion and independence of…”
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Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array by Stoeckel, Chris, Melzer, Marcel, Meinel, Katja, Tavakolibasti, Majid, Forke, Roman, Zimmermann, Sven, Otto, Thomas, Kuhn, Harald

“…This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic…”
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