Search Results - "Filies, O"

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    Surface roughness of thin layers—a comparison of XRR and SFM measurements by Filies, O., Böling, O., Grewer, K., Lekki, J., Lekka, M., Stachura, Z., Cleff, B.

    Published in Applied surface science (01-03-1999)
    “…X-ray reflectivity (XRR) studies of thin layers (3 to 120 nm thick) were performed for the determination of layer thickness, density and roughness. The…”
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    Journal Article Conference Proceeding
  2. 2

    Surface roughness of thin layers--a comparison of XRR and SFM measurements by Lekki, J, Filies, O, Boling, O, Grewer, K, Lekka, M, Stachura, Z, Cleff, B

    Published in Applied surface science (28-05-1998)
    “…X-ray reflectivity (XRR) studies of thin layers (3 to 120 nm thick) were performed for the determination of layer thickness, density and roughness. The…”
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    Journal Article