Search Results - "Felmetsger, Valeriy"

Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Microfins by Ramezani, Mehrdad, Felmetsger, Valeriy V., Rudawski, Nicholas G., Tabrizian, Roozbeh

“…A fabrication process is developed to grow <inline-formula> <tex-math notation="LaTeX">{c} </tex-math></inline-formula>-axis textured aluminum nitride (AlN)…”
Get full text

Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers by Clement, Marta, Jimena Olivares, Valeriy Felmetsger, Mirea, Teona, Olivares, Jimena, Iborra, Enrique

“…Sc-doped AIN polycrystalline films are attractive active layers for high frequency (GHz range)acoustic resonators owing to the significant rise in the material…”
Get full text

A Super-High-Frequency Non-Released Silicon Fin Bulk Acoustic Resonator by Ramezani, Mehrdad, Ghatge, Mayur, Felmetsger, Valeriy, Tabrizian, Roozbeh

“…This paper reports, for the first time, on a high quality-factor (Q) super-high-frequency bulk acoustic wave resonator realized from integration of aluminum…”
Get full text

Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content by Iborra, Enrique, Capilla, Jose, Olivares, Jimena, Clement, Marta, Felmetsger, Valeriy

“…In this work we present the assessment of the structural and piezoelectric properties of Al (0.5-x) Ti x N 0.5 compounds (titanium content <;6% atomic), which…”
Get full text

Piezoelectric and electroacoustic properties of V-doped and Ta-doped AlN thin films by Iborra, Enrique, Olivares, Jimena, Clement, Marta, Capilla, Jose, Felmetsger, Valeriy, Mikhov, Mikhail

“…In this paper we analyze the effects of doping AlN films with vanadium and tantalum to concentrations up to 6% atomic. The structure and composition of the new…”
Get full text

Sputter technique for deposition of AlN and ScAlN thin films in mass production by Felmetsger, Valeriy

“…Reactively sputtered aluminum nitride (AlN) thin films are widely used in fabrication of various micro devices requiring piezoelectric actuation, such as FBAR,…”
Get full text

Sputter technique for deposition of AlN, ScAlN, and Bragg reflector thin films in mass production by Felmetsger, Valeriy V.

“…Performance of AlN-based electroacoustic devices directly tie with piezoelectric and metal electrode film quality. In this paper, sputter techniques for the…”
Get full text

Sputter Process Optimization for Al0.7Sc0.3N Piezoelectric Films by Felmetsger, Valeriy, Mikhov, Mikhail, Ramezani, Mehrdad, Tabrizian, Roozbeh

“…Al 0.7 Sc 0.3 N films were reactively sputtered from AlSc segmented targets by ac powered dual-cathode S-gun magnetron. 0.5-2.0 μm thick films with homogeneous…”
Get full text

Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements by Clement, Marta, Felmetsger, Valeriy, Olivares, Jimena, Mirea, Teona, Sangrador, Jesus

“…Al 0.7 Sc 0.3 N films were reactively sputtered from Al-Sc segmented targets by ac powered dual-cathode S-gun magnetron. Films with homogeneous Sc…”
Get full text

High k^\cdot Q Waveguide-Based ScAlN-on-Si UHF and SHF Resonators by Ghatge, Mayur, Felmetsger, Valeriy, Tabrizian, Roozbeh

“…This paper reports, for the first time, on waveguide-based resonators implemented in scandium-doped aluminum nitride-on-silicon (ScAlN-on-Si) stack to…”
Get full text

Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins by Ramezani, Mehrdad, Felmetsger, Valeriy, Rudawski, Nicholas, Tabrizian, Roozbeh

“…A fabrication process is developed to grow c-axis textured aluminum nitride (AlN) films on the sidewall of single crystal silicon (Si) micro-fins to realize…”
Get full text

Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers by Clement, Marta, Felmetsger, Valeriy, Mirea, Teona, Iborra, Enrique

“…Sc-doped AlN polycrystalline films are attractive active layers for high frequency (GHz range) acoustic resonators owing to the significant enlargement of the…”
Get full text

Hafnium Nitride as High Acoustic Impedance Material for Fully Insulating Acoustic Reflectors by DeMiguel-Ramos, Mario, Clement, Marta, Mirea, Teona, Olivares, Jimena, Felmetsger, Valeriy, Flewitt, Andrew J., Iborra, Enrique

“…Non-conductive high acoustic impedance materials could provide a simpler solution to some of the challenges that solidly mounted resonators display in…”
Get full text