Search Results - "Farrow, R.C"

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  1. 1

    A high performance VME-based detector system for subsecond energy dispersive EXAFS by Salvini, G., Bogg, D., Dent, A.J., Derbyshire, G.E., Farrow, R.C., Felton, A., Ramsdale, C.

    Published in Physica. B, Condensed matter (01-03-1995)
    “…New detector instrumentation developed at Daresbury Laboratory enables high quality Energy Dispersive EXAFS (EDE) data to be collected in timescales of less…”
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    Journal Article
  2. 2

    First experimental data from XH, a fine pitch germanium microstrip detector for energy dispersive EXAFS (EDE) by Headspith, J., Groves, J., Luke, P.N., Kogimtzis, M., Salvini, G., Thomas, S.L., Farrow, R.C., Evans, J., Rayment, T., Lee, J.S., Goward, W.D., Amman, M., Mathon, O., Diaz-Moreno, S.

    “…Extended X-ray absorption fine structure (EXAFS) is an experimental technique to determine the chemical structure of a sample by analysing modulations within…”
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    Conference Proceeding
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    Global space charge effect in SCALPEL by Mkrtchyan, M., Munro, E., Liddle, J.A., Stanton, S.T., Waskiewicz, W.K., Farrow, R.C., Katsap, V.

    Published in Microelectronic engineering (01-06-2000)
    “…The global space charge (SC) effect in SCALPEL electron beam lithography system is investigated. First order properties of the SC lensing action (defocus and…”
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    Journal Article Conference Proceeding
  6. 6

    Marks for SCALPEL ® tool optics optimization by Farrow, R.C., Gallatin, G.M., Waskiewicz, W.K., Liddle, J.A., Kizilyalli, I., Kornblit, A., Biddick, C., Blakey, M., Klemens, F., Felker, J., Kraus, J., Mkrtchyan, M., Orphanos, P.A., Layadi, N., Merchant, S.

    Published in Microelectronic engineering (01-06-2000)
    “…A method for optimizing the electron optics of the SCALPEL exposure tool is described. The method uses the SCALPEL mark detection method with a grating mark as…”
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    Journal Article Conference Proceeding
  7. 7

    CMOS compatible alignment marks for the SCALPEL proof of lithography tool by Farrow, R.C., Waskiewicz, W.K., Kizilyalli, I., Ocola, L., Felker, J., Biddick, C., Gallatin, G., Mkrtchyan, M., Blakey, M., Kraus, J., Novembre, A., Orphanos, P., Peabody, M., Kasica, R., Kornblit, A., Klemens, F.

    Published in Microelectronic engineering (01-05-1999)
    “…SCALPEL alignment marks have been fabricated in a SiO 2/WSi 2 structure using SCALPEL lithography and plasma processing. The positions of the marks were…”
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    Journal Article Conference Proceeding
  8. 8

    Pattern processing results and characteristics for SCALPEL masks by Novembre, A.E., Blakey, M.I., Farrow, R.C., Kasica, R.J., Knurek, C.S., Liddle, J.A., Peabody, M.L.

    Published in Microelectronic engineering (1999)
    “…SCALPEL ( SCattering with Angular Limitation in Projection Electron Beam Lithography) masks consisting of a 150 nm thick SiN x membrane layer and 25–27.5 nm…”
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    Journal Article Conference Proceeding
  9. 9

    Optimization of a SCALPEL ® exposure tool using a diffractive image quality technique by Eichner, L., Blakey, M.I., Farrow, R.C., Liddle, J.A., Orphanos, P.A., Waskiewicz, W.K.

    Published in Microelectronic engineering (1999)
    “…Determining and maintaining the best exposure parameters, such as dose, focus, or illumination uniformity, is a primary concern in operating a modern day…”
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    Journal Article Conference Proceeding
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    Scanning electron microscope identification of weak links in superconducting thin films by MONROE, D, BROCKLESBY, W. S, FARROW, R. C, HONG, M, LIOU, S. H

    Published in Applied physics letters (26-09-1988)
    “…We have used a pulsed electron beam in a scanning electron microscope to produce highly localized (∼1 μm) changes in the electrical properties of a…”
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    Journal Article
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    4GLS: a new type of fourth generation light source facility by Poole, M.W., Bennett, S.L., Bowler, M.A., Bliss, N., Clarke, J.A., Dykes, D.M., Farrow, R.C., Gerth, C., Holder, D.J., MacDonald, M.A., Muratori, B., Owen, H.L., Quinn, F.M., Seddon, E.A., Smith, S.L., Suller, V.P., Thompson, N.R., Ross, I.N., McNeil, B.

    “…Consideration is now being given in the UK to the provision of an advanced facility at lower energy to complement the DIAMOND x-ray light source. The proposed…”
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    Conference Proceeding