Search Results - "Farhat, Saiqa"

Ellipsometry for cSiGe metrology by Farhat, Saiqa, Rangarajan, Srinivasan, Mcardle, Timothy J., Steigerwalt, Michael, Dawei Hu, Ming Dai

“…In this paper we report the effectiveness of optical ellipsometry in measuring thickness and Germanium % of channel SiGe on SOI substrate used in advanced node…”
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Silicon-Germanium (SiGe) composition and thickness determination via simultaneous smallspot XPS and XRF measurements by L'herron, Benoit, Loubet, Nicolas, Qing Liu, Wei Ti Lee, Klare, Mark, Pois, Heath, Kwan, Mike, Ying Wang, Larson, Tom, Farhat, Saiqa, Fullam, Jennifer, Gaudiello, John, Rangarajan, Srinivasan, Bing Sun, Wacquez, Romain, Maitrejean, Sylvian

“…The thickness and composition determination of Silicon-Germanium (SiGe) films have been demonstrated using simultaneous X-ray Photoelectron (XPS) and X-ray…”
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