An improved gallium liquid metal ion source geometry for nanotechnology

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Bibliographic Details
Published in:	Microelectronic engineering Vol. 73-74; pp. 132 - 138
Main Authors:	VAN ES, J. J, GIERAK, J, FORTIES, R. G, SUVOROV, V. G, VAN DEN BERGHE, T, DUBUISSON, Ph, MONNET, I, SEPTIER, A
Format:	Conference Proceeding Journal Article
Language:	English
Published:	Amsterdam Elsevier Science 01-06-2004
Subjects:	Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Testing, measurement, noise and reliability Voltage threshold Microelectronic fabrication Liquid metal Transmission electron microscopy Voltage current curve High voltage Test Ion source In situ Current density Focused ion beam technology Nanotechnology
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Description
ISSN:	0167-9317 1873-5568
DOI:	10.1016/S0167-9317(04)00086-3