Search Results - "Erjavec, James"

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    Vapor deposition polymerization of novel Parylene-N dielectric thin films

    Vapor deposition polymerization of novel Parylene-N dielectric thin films by Erjavec, James

    Published 01-01-2002
    “…Integrated Circuit (IC) technology has improved in industries ongoing quest for greater speed and higher efficiency. IC technology has shrunk into the…”
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    Dissertation
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  2. 2
    Novel Parylene-N films deposited at liquid nitrogen temperatures

    Novel Parylene-N films deposited at liquid nitrogen temperatures by Erjavec, James, Sikita, John, Beaudoin, Stephen P, Raupp, Gregory B

    Published in Materials letters (01-06-1999)
    “…Vapor deposition polymerization of Parylene-N films at −196°C produces optically opaque, highly porous films. Film density averaged 0.195 g/cm 3, more than…”
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    Journal Article
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