Search Results - "Engdahl, Chris"
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Preferentially oriented growth of diamond films on silicon with nickel interlayer
Published in SN applied sciences (01-08-2022)“…A multistep deposition technique is developed to produce highly oriented diamond films by hot filament chemical vapor deposition (HFCVD) on Si (111)…”
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Selective Area Deposition of Hot Filament CVD Diamond on 100 mm MOCVD Grown AlGaN/GaN Wafers
Published in Crystal growth & design (06-02-2019)“…A new technique is reported for selective growth of polycrystalline diamond by hot filament chemical vapor deposition (HFCVD) on AlGaN/GaN-on-Si (111) wafers…”
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Effect of CH4 concentration on the early growth stage of patterned diamond using high seeding density and hot filament chemical vapor deposition
Published in Journal of materials science (01-04-2024)“…A bottom-up method is described to grow patterned polycrystalline diamond on silicon substrates using polymer assisted seeding and photolithography. Diamond…”
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Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate
Published in Journal of materials science. Materials in electronics (01-06-2020)“…The effect of precursor stoichiometry is reported on morphology, phase purity, and texture formation of polycrystalline diamond films. The diamond films were…”
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Journal Article