Search Results - "Ekkels, P."

Effect of substrate charging on the reliability of capacitive RF MEMS switches by Czarnecki, P., Rottenberg, X., Soussan, P., Ekkels, P., Muller, P., Nolmans, P., De Raedt, W., Tilmans, H.A.C., Puers, R., Marchand, L., De Wolf, I.

“…In this paper, we show that substrate charging is another possible failure mechanism limiting the lifetime of capacitive RF MEMS switches. Switches fabricated…”
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Air gap-based MEMS switch technology using nickel surface micromachining by Ekkels, P., Rottenberg, X., Czarnecki, P., Philipsen, H., Mertens, R., Puers, R., Tilmans, H.A.C.

“…This paper presents a simple and robust process for fabrication of functional electrostatic RF-MEMS switching devices with lifetimes easily exceeding 10 8…”
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Fabrication of functional structures on thin silicon nitride membranes by Ekkels, P., Tjerkstra, R.W., Krijnen, G.J.M, Berenschot, J.W., Brugger, J., Elwenspoek, M.C.

“…A process to fabricate functional polysilicon structures above large (4×4 mm 2) thin (200 nm), very flat LPCVD silicon rich nitride membranes was developed…”
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A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators by Dancila, D, Ekkels, P, Rottenberg, X, Huynen, I, De Raedt, W, Tilmans, H A C

“…This paper reports the design and the realization of a variable-sized MEMS-based Faraday cage, used to tune the resonant frequency of a silicon micromachined…”
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45 degrees loaded-line phase shifter using switchable slow wave transmission lines by Brebels, S, Rottenberg, X, Ekkels, P, Mertens, R P, De Raedt, W

“…The phase shifter design proves the RF principle of the EFFA based switchable slow-wave line. The EFFA can however be used as switch or tunable device in many…”
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Fabrication of an active nanostencil with integrated microshutters by Tjerkstra, R.W., Ekkels, P., Krijnen, G., Egger, S., Berenschot, E., Ma, K.C., Brugger, J.

“…An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open…”
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New insights into charging in capacitive RF MEMS switches by Czarnecki, P., Rottenberg, X., Soussan, P., Nolmans, P., Ekkels, P., Muller, P., Tilmans, H.A.C., De Raedt, W., Puers, R., Marchand, L., De Wolf, I.

“…This paper discusses dielectric charging in electrostatic RF-MEMS switches. We show that more than one charging mechanism can be present and impacts their…”
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RF-MEMs-based millimeter-wave switch for integrated antenna applications by Enayati, A, Rottenberg, X, Ekkels, P, De Raedt, W, Vandenbosch, G A E

“…A switch for millimeter wave applications is introduced. It uses two air-gap switched capacitors, to load a transmission line in order to control the insertion…”
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Simple and Robust Air Gap-Based MEMS Switch Technology for RF-Applications by Ekkels, P., Rottenberg, X., Czarnecki, P., Puers, R., Tilmans, H.A.C.

“…This paper presents a simple and robust process for fabrication of functional electrostatic RF-MEMS switching devices with lifetimes easily exceeding 10 8…”
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Robustness of electrostatic MEMS actuators against electrical overstress by De Coster, J., Rottenberg, X., Sangameswaran, S., Ekkels, P., Tilmans, H.A.C., De Wolf, I.

“…The response of electrostatic actuators to electrical overstress is studied in this paper. More specifically, the use of passive components (resistors and…”
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Influence of the substrate on the lifetime of capacitive RF MEMS switches by Czarnecki, P., Rottenberg, X., Soussan, P., Ekkels, P., Muller, P., Nolmans, P., De Raedt, W., Tilmans, H.A.C., Puers, R., Marchand, L., De Wolf, I.

“…We show for the first time that the substrate can influence the lifetime of capacitive RF MEMS switches. We demonstrate that the influence of the substrate…”
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Surface micromachined platinum structures with a high thermal stability by Ekkels, P., Rottenberg, X., Puers, R., Tilmans, H.A.C.

“…Nowadays, the armatures in RF-MEMS devices such as switches and variable capacitors mostly consist of highly conductive metals which often show a low thermal…”
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Electrostatic fringing-field actuator (EFFA): Application towards a low-complexity RF-MEMS technology by Rottenberg, X., Nolmans, P., Ekkels, P., Czarnecki, P., Mertens, R.P., Nauwelaers, B., De Wolf, I., De Raedt, W., Tilmans, H.A.C.

“…This paper presents a novel electrostatic actuator using fringing fields as actuation mechanism, ie electrostatic fringing-field actuator or EFFA. The novel…”
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Novel Effa-Based Thin-Film RF-MEMS Technology by Rottenberg, X., Ekkels, P., Brebels, S., Webers, T., Czarnecki, P., Mertens, R.P., Nauwelaers, B., Puers, R., Marchand, L., De Wolf, I., De Raedt, W., Tilmans, H.A.C.

“…This paper presents applications of a novel electrostatic actuator using fringing fields as actuation mechanism, i.e. Electrostatic Fringing-Field Actuator or…”
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