Search Results - "Ehrfeld, W."
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1
State-of-the-art in microreaction technology: concepts, manufacturing and applications
Published in Electrochimica acta (01-01-1999)“…Microreactors as a novel concept in chemical technology enable the introduction of new reaction procedures in chemistry, molecular biology and pharmaceutical…”
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2
Direct fluorination of toluene using elemental fluorine in gas/liquid microreactors
Published in Journal of fluorine chemistry (01-07-2000)“…Direct fluorination of toluene, pure or dissolved in either acetonitrile or methanol, using elemental fluorine was investigated in gas/liquid microreactors,…”
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3
Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
Published in Radiation physics and chemistry (Oxford, England : 1993) (01-03-1995)“…In recent years the LIGA technique evolved as a basic fabrication process for the production of a large variety of microstructure products utilizing metals,…”
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4
Utilization of Micromixers for Extraction Processes
Published in Chemical engineering & technology (01-01-2001)“…The aim of the investigation was to evaluate the extraction performance of a mixer settler set‐up for miniplant technology using static micromixers as an…”
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5
Fabrication of photonic crystals by deep x-ray lithography
Published in Applied physics letters (15-09-1997)“…We have developed a new microfabrication technique for the construction of three-dimensional photonic crystals. In particular, we used multiple tilted x-ray…”
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6
Specific bio-recognition reactions observed with an integrated Mach–Zehnder interferometer
Published in Biosensors & bioelectronics (30-04-1999)“…The combination of an integrated Mach–Zehnder-interferometer (iMZI) at the bottom of a fluidic microchannel system with supramolecular interfacial binding…”
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Fabrication technologies for microsystems utilizing photoetchable glass
Published in Microelectronic engineering (01-01-1996)“…Photoetchable glass is a very promising material for the production of components for a wide variety of microsystems. High aspect ratio microstructures can be…”
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8
Materials of LIGA technology
Published in Microsystem technologies (1999)Get full text
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9
Electrochemistry and microsystems
Published in Electrochimica acta (30-09-2003)“…Electrochemistry takes a key position in products and manufacturing processes of microtechnology, which has established a multi-billion dollar market with…”
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10
Strategies for size reduction of microreactors by heat transfer enhancement effects
Published in Chemical engineering communications (01-04-2003)“…One of the likely aims of reactor miniaturization in the field of chemical production and energy generation is to increase the conversion to the desired…”
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11
Combination of excimer laser micromachining and replication processes suited for large scale production
Published in Applied surface science (01-02-1995)“…Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and…”
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12
Micromachined aperture probe tip for multifunctional scanning probe microscopy
Published in Ultramicroscopy (01-03-1998)“…The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near-field optical microscopy. The sensor consists of a…”
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13
Multifunctional AFM/SNOM cantilever probes: Fabrication and measurements
Published in Microelectronic engineering (01-06-2000)“…The microfabrication process for cantilever probes for combined atomic force (AFM) and scanning near-field optical microscopy (SNOM) is described. The probes…”
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14
Electrostatically operated micromirrors for Hadamard transform spectrometer
Published in IEEE journal of selected topics in quantum electronics (01-01-1999)“…The paper presents the development of a linear micromirror array which can be used as a switchable entrance mask for a double-array Hadamard transform…”
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15
Synthesis of Polysulfides Containing the Triazeno Group and Their Application as Photoresists in Excimer Laser Polymer Ablation
Published in Chemistry of materials (18-02-1997)“…Two bifunctional unsaturated monomers containing the photosensitive triazene group were synthesized and reacted with dithiols. A radical polyaddition afforded…”
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16
Highly parallel mass fabrication and assembly of microdevices
Published in Microsystem technologies (01-11-2001)Get full text
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17
Microsystem technology: Between research and industrial application
Published in Microelectronic engineering (01-03-1998)“…Microsystemtechnology is defined in comparison to microelectronics. The development of dedicated microfabrication technologies is summarized and recent…”
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Miniaturized plastic micro plates for applications in HTS
Published in Microsystem technologies : sensors, actuators, systems integration (1999)Get full text
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19
Accuracy of structure transfer in deep X-ray lithography
Published in Microelectronic engineering (01-02-1997)“…Deep X-ray lithography with synchrotron radiation (DXRL) constitutes the key microfabrication process step in the LIGA technology. Microcomponents with a…”
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20
Investigation of the adhesive strength of PMMA structures on substrates obtained by deep X-ray lithography
Published in Microelectronic engineering (01-01-1996)“…The adhesive strength of PMMA structures obtained by deep X-ray lithography with synchrotron radiation is a decisive factor for effective structure replication…”
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