11.5: A MEMS-based vacuum gauge for measuring pressure and out-gassing rates in miniaturized vacuum microelectronic devices

Cr/Au meander-shaped resistors were fabricated on 200nm thick square silicon nitride diaphragms on silicon with diaphragm dimensions of 0.775mm, 1.025mm, 1.275mm, 1.775mm, and 2.275mm. At 760Torr, the resistors were heated to about 20°C-60°C above ambient by Joules heating and the resistances were m...

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Bibliographic Details

Published in:	International Vacuum Nanoelectronics Conference pp. 215 - 216
Main Authors:	Chang, J, Jayapratha, N, Kuljic, R, Salvador, B, Cantwell, M, Broughton, K, Kunzer, B, Po Keong Ng, Selner, A, Razo, R, Harris, M, Qilu He, Syerov, S, Harry, D, Kanneganti, S, Benison, A, Edlavitch, B, Dankovic, T, Banerjee, K, Feinerman, A, Busta, H
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-07-2010
Subjects:	Heating measuring of out-gassing rates MEMS-based vacuum gauges Microelectronics miniaturized Pirani gauges miniaturized thermal vacuum gauges Miniaturized vacuum gauges Pressure measurement Resistance Resistors Sensors Silicon vacuum pressure measurements
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