Search Results - "Ebefors, T."

Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements by Haasl, S., Mucha, D., Chernoray, V., Ebefors, T., Enoksson, P., Lofdahl, L., Stemme, G.

“…In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A…”
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Dynamic actuation of polyimide V-groove joints by electrical heating by Ebefors, Thorbjörn, Kälvesten, Edvard, Stemme, Göran

“…New robust three-dimensional silicon structures with integrated heaters for dynamic actuation have been fabricated and tested. The structures can be used in…”
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Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ by Liljeholm, J., Ebefors, T., Rohrmann, H., Shah, U., Oberhammer, J.

“…This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable…”
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High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications by de Veen, P.J., Bos, C., Hoogstede, D.R., Revenberg, C.Th.A., Liljeholm, J., Ebefors, T.

“…This paper presents our exploration of microfocus and high-resolution X-ray computed tomography (CT) on open high-aspect ratio through Silicon via (TSV) test…”
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Design and Fabrication of Addressable Microfluidic Energy Storage MEMS Device by Lifton, V. A., Simon, S., Holmqvist, J., Ebefors, T., Jansson, D., Svedin, N.

“…Design and fabrication of microfluidic energy storage devices that are based on the control of the liquid electrolyte inside a power cell are presented. A…”
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Three dimensional silicon triple-hot-wire anemometer based on polyimide joints by Ebefors, T., Kalvesten, E., Stemme, G.

“…The first three dimensional (3D) flow sensor probe based on polyimide joints has been fabricated and successfully tested. The new 3D sensor, which is specially…”
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A robust micro conveyer realized by arrayed polyimide joint actuators by Ebefors, T., Mattsson, J.U., Kalvesten, E., Stemme, G.

“…A new micro motion system (micro-conveyer) based on arrays of movable robust silicon legs has been developed and investigated. The motion is achieved by…”
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New robust small radius joints based on thermal shrinkage of polyimide in V-grooves by Ebefors, T., Kalvesten, E., Vieider, C., Stemme, G.

“…A novel and simple technology for making robust three-dimensional (3-D) silicon structures with small radii of bending has been developed and investigated. The…”
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Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurements by Haasl, S., Mucha, D., Chernoray, V., Ebefors, T., Enoksson, P., Lofdahl, L., Stemme, G.

“…We present the first micromachined metal hot-wire anemometer sensor for use in near-wall turbulence measurements. To measure close to the surface without the…”
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