A Deeper Understanding of Well Charging Reliability with Circuit Relevant Test Structures

Antenna rules relating to well charging is becoming an important aspect to consider in design rule checks on the product apart from the conventional antenna to gate ratio design rules. In this paper, we provided a better understanding of the well charging phenomena in technologies with deep N-Well u...

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Bibliographic Details
Published in:2022 IEEE International Reliability Physics Symposium (IRPS) pp. P45-1 - P45-4
Main Authors: Tan, T. L., Eng, C. W., Xu, H., Soon, J. M., Ebard, E., Siddabathula, M., Phoong, B. F., Poh, K. H., Prabhu, M., Zhao, X. -L., Koo, J. M., Cho, K., Zhang, G.-W.
Format: Conference Proceeding
Language:English
Published: IEEE 01-03-2022
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Summary:Antenna rules relating to well charging is becoming an important aspect to consider in design rule checks on the product apart from the conventional antenna to gate ratio design rules. In this paper, we provided a better understanding of the well charging phenomena in technologies with deep N-Well using different layout configuration test structures that are typical of a circuit. A new power law correlation with a well exponent value based on characterized PID gate leakage data is introduced. Moreover, a comparison of well charging design solutions is also presented and validated on the circuit-like test structures.
ISSN:1938-1891
DOI:10.1109/IRPS48227.2022.9764564