Search Results - "EROKHIN, Y. N"
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Ga delta-doping layers in silicon
Published in Applied physics letters (16-09-1991)“…Delta-doping layers in silicon have been made by deposition of 0.39 monolayer Ga on Si(001). The dopant atoms have been buried in the host crystal using a…”
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2
Morphological instability and Si diffusion in nanoscale cobalt silicide films formed on heavily phosphorus doped polycrystalline silicon
Published in Applied physics letters (04-10-1993)“…In this letter we examine the interdiffusion and reaction of deposited cobalt layers during the formation of nanoscale (<35 nm) silicide films on heavily…”
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3
In situ electric field perturbations of deep trap accumulation in silicon during proton ion implantation
Published in Applied physics letters (27-03-1995)“…The influence of in situ perturbations of the silicon target crystal electronic subsystem during H+ ion implantation has been studied in terms of the type,…”
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4
Recombination enhanced suppression of deep trap accumulation in silicon during He + ion implantation
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-03-1995)“…The influence of in situ forward bias on the accumulation of defect complexes in p +-n diodes during 75 keV He + ion implantation has been investigated. Deep…”
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Spatially confined nickel disilicide formation at 400°C on ion implantation preamorphized silicon
Published in Applied physics letters (06-12-1993)“…The localized formation of continuous silicide layers via solid state reaction of nickel atoms with ion implantation preamorphized silicon is described. Ni…”
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