Development of new capacitive strain sensors based on thick film polymer and cermet technologies

Development of new capacitive strain sensors based on thick film polymer and cermet technologies

In this work, the strain sensing characteristics of new thick film capacitive sensors are presented. New cermet and polymer dielectric pastes based on lead–zirconate–titanate (PZT) and polyvinylidene fluoride (PVDF) have been developed. The screen printing technique has been used to fabricate the se...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. Vol. 79; no. 2; pp. 102 - 114
Main Authors: Arshak, K.I., McDonagh, D., Durcan, M.A.
Format: Journal Article
Language:English
Published: Lausanne Elsevier B.V 01-02-2000
Elsevier Science
Subjects:
Capacitive strain sensor
Cermet dielectrics
Exact sciences and technology
General equipment and techniques
Instruments for strain, force and torque
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Physics
Polymer dielectrics
Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
Thick film sensors
Transducers
Capacitive strain sensor
Polymer dielectrics
Cermet dielectrics
Thick film sensors
Thick film devices
Composite dielectric
Cermets
Capacitive transducer
Polymer films
Experimental study
Strain sensors
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Summary:In this work, the strain sensing characteristics of new thick film capacitive sensors are presented. New cermet and polymer dielectric pastes based on lead–zirconate–titanate (PZT) and polyvinylidene fluoride (PVDF) have been developed. The screen printing technique has been used to fabricate the sensors on 96% alumina substrates. Various strain gauge characteristics have been studied, including the electrical properties of both the cermet and polymeric films. Both the cermet and polymer sensors exhibit good dielectric properties with gauge factors comparable to piezoresistive strain sensors. An application circuit based on integrated bipolar arrays incorporating the new capacitive strain sensors was designed and tested. The output from this circuit is a frequency that is proportional to the applied strain.
ISSN:0924-4247
1873-3069
DOI:10.1016/S0924-4247(99)00275-7