Search Results - "Drevillon, B."
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1
Recombination traffic in highly crystallized undoped microcrystalline Si films studied by steady state photoconductivity
Published in Thin solid films (26-07-2006)“…The dependences of photoconductivity ( σ ph) of highly crystallized dense undoped hydrogenated microcrystalline silicon (μc-Si:H) thin films on the temperature…”
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2
Monitoring critical dimensions of bidimensional gratings by spectroscopic ellipsometry and Mueller polarimetry
Published in Physica status solidi. A, Applications and materials science (01-04-2008)“…In this work we characterized two bidimensional gratings consisting each of a square array of square holes etched in a photoresist layer deposited on silicon…”
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Journal Article Conference Proceeding -
3
Optical characterisation of anatase: a comparative study of the bulk crystal and the polycrystalline thin film
Published in Thin solid films (17-12-2001)“…The optical parameters of crystalline anatase and polycrystalline anatase films prepared by reactive magnetron sputtering were examined by spectroscopic…”
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4
Angle-resolved Mueller polarimeter using a microscope objective
Published in Physica status solidi. A, Applications and materials science (01-04-2008)“…A new Mueller polarimeter based on liquid crystals and a microscope objective is presented for the characterization of diffraction gratings in a conical…”
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5
An interfacial study of a hydrogenated carbon interlayer for adhesion enhancement of plasma deposited silica thin films on polycarbonate
Published in Journal of adhesion science and technology (01-01-2002)“…This work presents a new plasma treatment for the adhesion enhancement of a plasma deposited silica layer to polycarbonate. After initial oxygen plasma…”
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6
Ellipsometric method for real time control of thin film deposition on imperfect substrates
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-05-2002)“…In this work we present a method of the ellipsometric control for optical filter deposition. This control procedure uses the length of the real time…”
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7
Spectroscopic Mueller polarimeter based on liquid crystal devices
Published in Thin solid films (01-05-2004)“…A new spectroscopic Mueller matrix polarimeter based on liquid crystal devices is presented. Fast spectroscopic measurements (approx. 1 s) of a complete…”
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8
Real time monitoring of the growth of transparent thin films by spectroscopic ellipsometry
Published in Applied physics letters (14-08-1995)“…Real time monitoring of the growth of plasma deposited transparent thin films by spectroscopic phase modulated ellipsometry (SPME) is presented. Two on-line…”
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9
Real time control of plasma deposited optical filters by multiwavelength ellipsometry
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-07-2000)“…Real time control of optical filters by multiwavelength ellipsometry is presented. The filters consist of SiO 2 / Si3N 4 multilayers deposited on transparent…”
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Conference Proceeding Journal Article -
10
Surface modifications of polycarbonate (PC) and polyethylene terephtalate (PET) by cold remote nitrogen plasma (CRNP)
Published in Surface science (15-05-1996)“…Industrial PC and PET specimens have been treated by CRNP with pure N 2 or with N 2O 2 mixtures in order to modify their adhesion and surface properties…”
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11
General methods for optimized design and calibration of Mueller polarimeters
Published in Thin solid films (01-05-2004)“…A Mueller polarimeter always comprises a polarization state generator (PSG) and a polarization state analyzer (PSA), whose configurations determine the…”
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12
Mueller polarimetric imaging system with liquid crystals
Published in Applied optics (2004) (10-05-2004)“…We present a new polarimetric imaging system based on liquid-crystal modulators, a spectrally filtered white-light source, and a CCD camera. The whole Mueller…”
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13
Time resolved microwave conductivity measurements for the characterization of transport properties in thin film micro-crystalline silicon
Published in Thin solid films (1997)“…The time resolved microwave conductivity (TRMC) technique measures the transient change in microwave reflectivity that carriers generated by a laser pulse…”
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14
In situ investigation of the optoelectronic properties of transparent conducting oxide/amorphous silicon interfaces
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15
Contactless electronic transport analysis of microcrystalline silicon
Published in Thin solid films (11-01-1999)“…Electronic transport of microcrystalline silicon is analyzed by diffusion-induced time resolved microwave conductivity (DTRMC), a new contactless method based…”
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Journal Article Conference Proceeding -
16
Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system
Published in Thin solid films (16-07-2007)“…We have studied the deposition of silicon oxide, oxynitrides and silicon nitride in a novel, scalable, low-pressure high-density plasma system based on the ECR…”
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Journal Article Conference Proceeding -
17
Plasma treatment of polycarbonate for improved adhesion
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-2002)“…The deposition of silicon alloys for protective and optical coatings on polymers is of increasing interest. The understanding of the plasma polymer interaction…”
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18
In situ investigation of amorphous silicon-silicon dioxide interfaces by infrared ellipsometry
Published in Applied physics letters (04-04-1994)“…An in situ investigation of the a-Si:H-a-SiO2 interfaces by infrared phase modulated ellipsometry is presented. 20–30-Å-thick intermixing layers are clearly…”
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19
Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences
Published in Applied physics letters (26-06-1995)“…We report the results of an in situ spectroscopic ellipsometry study concerning the substrate dependence of the evolution of microcrystalline silicon films…”
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20
Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry
Published in Applied physics letters (05-09-1994)“…A quantitative analysis of IR ellipsometry spectra of borophosphosilicate glass (BPSG) thin films deposited on silicon wafers is presented. The film thickness…”
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