Search Results - "Dosho, Chisei"
-
1
Defects Introduced by MeV-Energy Ion Implantation into Si Probed by a Monoenergetic Positron Beam
Published in Japanese Journal of Applied Physics (01-08-1991)“…Vacancy-type defects in 2-MeV B + -, 2-MeV P + - and 3-MeV As + -ion implanted Si(100) were studied by a monoenergetic positron beam. The depth distributions…”
Get full text
Journal Article -
2
Defects in metalorganic chemical vapor deposition epitaxy-grown ZnSe films on GaAs investigated by monoenergetic positrons
Published in Japanese Journal of Applied Physics (01-10-1991)“…Defects in metalorganic chemical vapor deposition epitaxy (MOVPE)-grown ZnSe heteroepilayers on GaAs were investigated by monoenergetic positrons. The present…”
Get full text
Journal Article -
3
The defect characterization of heavily Si-doped molecular beam epitaxy-grown GaAs by the monoenergetic positron method
Published in Japanese Journal of Applied Physics (01-11-1991)“…Monoenergetic (100 eV-30 keV) positrons were used as a defect probe for heavily Si-doped GaAs with a thickness of 300nm grown by molecular beam epitaxy (MBE)…”
Get full text
Journal Article -
4
Variable-energy positron studies of vacancy-type defects in TiN films on Si
Published in Japanese Journal of Applied Physics (01-08-1990)“…A variable-energy (0–30 keV) positron beam has been used as a nondestructive probe for titanium nitride (TiN) films with a thickness of 800 nm deposited on Si…”
Get full text
Journal Article -
5
Defect Production in Phosphorus Ion-Implanted SiO 2 (43 nm)/Si Studied by a Variable-Energy Positron Beam
Published in Japanese Journal of Applied Physics (01-02-1991)“…Vacancy-type defects in 150-keV P + -implanted SiO 2 (43 nm)/Si(100) specimens were studied by a variable-energy positron beam. The results show that the…”
Get full text
Journal Article