Search Results - "Djomeni, Larissa"

Study of low temperature MOCVD deposition of TiN barrier layer for copper diffusion in high aspect ratio through silicon vias by Djomeni, Larissa, Mourier, Thierry, Minoret, Stéphane, Fadloun, Sabrina, Piallat, Fabien, Burgess, Steve, Price, Andrew, Zhou, Yun, Jones, Christopher, Mathiot, Daniel, Maitrejean, Sylvain

“…•The MOCVD TiN films are N-riched.•Plasma treatment changes the films from amorphous to 7nm crystal grain size.•The films have larger gap in Ti and N…”
Get full text

In-situ X-ray μLaue diffraction study of copper through-silicon vias by Sanchez, Dario Ferreira, Reboh, Shay, Weleguela, Monica Larissa Djomeni, Micha, Jean-Sébastien, Robach, Odile, Mourier, Thierry, Gergaud, Patrice, Bleuet, Pierre

“…In this work, we developed an original in-situ strain investigation of a Cu through silicon vias (TSVs) sample using X-ray μLaue diffraction mapping. We…”
Get full text