Search Results - "Dimov, O."

Overview of the STORM program application to 193nm singe layer resists by Croffie, E., Cheng, M., Neureuther, A., Cirelli, R., Houlihan, F., Sweeney, J., Watson, P., Nalamasu, O., Rushkin, I., Dimov, O., Gabor, A.

“…A new TCAD software tool named STORM (Simulation TOols for Resist Models) has been developed to support the quantitative modeling of resist processes in deep…”
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Overview of the STORM program application to 193nm single layer resists by Croffie, E, Cheng, M, Neureuther, A, Cirelli, R, Houlihan, F, Sweeney, J, Watson, P, Nalamasu, O, Rushkin, I, Dimov, O, Gabor, A

“…A new TCAD software tool named STORM (Simulation TOols for Resist Models) has been developed to support the quantitative modeling of resist processes in deep…”
Get full text