Search Results - "Dighe, Prasanna"

Study of relationship between 300 mm Si wafer surface and annealing temperatures for advanced semiconductor-based applications by Wocko, Andreas, Radovanovic, Sanda, Dighe, Prasanna

“…Surface morphology dependence on annealing conditions is one of the most important parameters that is being monitored in current manufacturing environments…”
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Evaluation of Post Ion-Implantation Resist Strip with the Background Signal of a Light Scattering Tool by Halder, Sandip, Vos, Rita, Wada, Masayuki, Tsvetanova, Diana, Claes, Martine, Mertens, Paul W, Radovanović, Sanda, Dighe, Prasanna, Amann, Christophe, Simpson, Gavin, Polli, Marco

“…A new method for the fast evaluation of photoresist residue removal efficiency is discussed in this paper. In this method "haze" which is the low frequency…”
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Use of Surface Haze for Evaluation of Photoresist Residue Removal Efficiency by Halder, S., Vos, R., Masayuki, W., Kenis, K., Bearda, T., Radovanovic, S., Dighe, P., Leunissen, L.H.A., Mertens, P.W.

“…A new method for the fast evaluation of photoresist residue removal efficiency is discussed in this paper. In this method ldquohazerdquo which is the…”
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