Search Results - "Diebold, C"

Enhanced Optical Second-Harmonic Generation from the Current-Biased Graphene/SiO2/Si(001) Structure by An, Yong Q, Nelson, Florence, Lee, Ji Ung, Diebold, Alain C

“…We find that optical second-harmonic generation (SHG) in reflection from a chemical-vapor-deposition graphene monolayer transferred onto a SiO2/Si(001)…”
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Optical properties of large-area polycrystalline chemical vapor deposited graphene by spectroscopic ellipsometry by Nelson, F. J., Kamineni, V. K., Zhang, T., Comfort, E. S., Lee, J. U., Diebold, A. C.

“…Spectroscopic ellipsometry was used to characterize the complex refractive index of chemical vapor deposition (CVD) graphene grown on copper foils and…”
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Perspective: Optical measurement of feature dimensions and shapes by scatterometry by Diebold, Alain C., Antonelli, Andy, Keller, Nick

“…The use of optical scattering to measure feature shape and dimensions, scatterometry, is now routine during semiconductor manufacturing. Scatterometry…”
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3D-interconnect: Visualization of extrusion and voids induced in copper-filled through-silicon vias (TSVs) at various temperatures using X-ray microscopy by Kong, LayWai, Rudack, Andrew C., Krueger, Peter, Zschech, Ehrenfried, Arkalgud, Sitaram, Diebold, A.C.

“…X-ray micrographs compare a 4μm TSV before (A) and after 225°C annealing (B). The copper extrusion and voids-induced at the center of TSV are clearly seen…”
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Electron-phonon interaction effects on the direct gap transitions of nanoscale Si films by Kamineni, V. K., Diebold, A. C.

“…This study shows that the dielectric function of crystalline Si quantum wells ( c -Si QW) is influenced by both carrier confinement and electron-phonon…”
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Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications by Dey, Sonal, Yu, Kai-Hung, Consiglio, Steven, Tapily, Kandabara, Hakamata, Takahiro, Wajda, Cory S., Leusink, Gert J., Jordan-Sweet, Jean, Lavoie, Christian, Muir, David, Moreno, Beatriz, Diebold, Alain C.

“…Resistance capacitance time delay in Cu interconnects is becoming a significant factor requiring further performance improvements in future nanoelectronic…”
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Dielectric properties and thickness metrology of strain engineered GaN/AlN/Si (111) thin films grown by MOCVD by Tungare, M., Kamineni, V.K., Shahedipour-Sandvik, F., Diebold, A.C.

“…Maturity of silicon nanoelectronics and the high quality of 300mm epi-Si wafers make these substrates an ideal choice for the growth of high quality…”
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Investigation of optical properties of benzocyclobutene wafer bonding layer used for 3D interconnects via infrared spectroscopic ellipsometry by Kamineni, Vimal K., Singh, Pratibha, Kong, LayWai, Hudnall, John, Qureshi, Jamal, Taylor, Chris, Rudack, Andy, Arkalgud, Sitaram, Diebold, Alain C.

“…Benzocyclobutene (BCB) used for bonding silicon wafers to enable 3D interconnect technology is characterized using spectroscopic ellipsometry (SE). SE is a…”
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Subsurface Imaging with Scanning Ultrasound Holography by Diebold, Alain C.

“…Characterization of subsurface structure is critical to almost every area of science and engineering. Every innovative microscopy technique seems to highlight…”
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Observation of quantum confinement and quantum size effects by Diebold, A. C., Price, J.

“…Recently, the change in optical properties of ultra‐thin silicon on insulator films was shown to be due to quantum confinement. The E1 critical point shifted…”
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Optical second-harmonic generation induced by electric current in graphene on Si and SiC substrates by An, Yong Q., Rowe, J. E., Dougherty, Daniel B., Lee, Ji Ung, Diebold, Alain C.

“…We find that the flow of direct electric current (dc) through graphene on substrate enhances surface optical second-harmonic generation (SHG) from the…”
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Electronic Excitations in Graphene in the 1–50 eV Range: The π and π + σ Peaks Are Not Plasmons by Nelson, Florence J, Idrobo, Juan-Carlos, Fite, John D, Mišković, Zoran L, Pennycook, Stephen J, Pantelides, Sokrates T, Lee, Ji Ung, Diebold, Alain C

“…The field of plasmonics relies on light coupling strongly to plasmons as collective excitations. The energy loss function of graphene is dominated by two peaks…”
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Enhanced optical transmission by light coaxing: Mechanism of the TEM-mode excitation by Baida, F.I., Belkhir, A., Arar, O., Barakat, E.H., Dahdah, J., Chemrouk, C., Van Labeke, D., Diebold, C., Perry, N., Bernal, M.-P.

“…This paper presents a theoretical study showing the mechanism of light transmission through opaque metallic films perforated with nanocoaxial apertures thanks…”
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Enhancing one dimensional sensitivity with plasmonic coupling: erratum by O'Mullane, Samuel, Peterson, Brennan, Race, Joseph, Keller, Nick, Diebold, Alain C

“…Our manuscript contained data from unconverged rigorous coupled wave approximation (RCWA) simulations that resulted in incorrect description of minima…”
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Enhancing one dimensional sensitivity with plasmonic coupling by O'Mullane, Samuel, Peterson, Brennan, Race, Joseph, Keller, Nick, Diebold, Alain C

“…In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use…”
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Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films by Mukundan, Vineetha, Consiglio, Steven, Triyoso, Dina H., Tapily, Kandabara, Schujman, Sandra, Mart, Clemens, Kämpfe, Thomas, Weinreich, Wenke, Jordan-Sweet, Jean, Clark, Robert D., Leusink, Gert J., Diebold, Alain C.

“…In this Letter, we report the percentage of the ferroelectric phase in a 10-nm-thick Hf0.5Zr0.5O2 (HZO) film deposited in a metal-insulator-metal stack by…”
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Observation of interfacial electrostatic field-induced changes in the silicon dielectric function using spectroscopic ellipsometry by Price, J., Lysaght, P. S., Song, S. C., Diebold, A. C., An, Y. Q., Downer, M. C.

“…This work investigates the capability of spectroscopic ellipsometry to measure charge trapping centers in thin dielectric films. Specific interfacial…”
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The Impact of Medicare Part D on Self-Employment by Moulton, Jeremy G., Diebold, Jeffrey C., Scott, John C.

“…We explore the relationship between access to affordable health insurance and self-employment using exogenous variation from the introduction of Medicare Part…”
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Thin dielectric film thickness determination by advanced transmission electron microscopy by Diebold, A C, Foran, B, Kisielowski, C, Muller, D A, Pennycook, S J, Principe, E, Stemmer, S

“…High-resolution transmission electron microscopy (HR-TEM) has been used as the ultimate method of thickness measurement for thin films. The appearance of phase…”
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Application of Aberration-Corrected TEM and Image Simulation to Nanoelectronics and Nanotechnology by Korgel, B.A., Lee, D.C., Hanrath, T., Yacaman, M.J., Thesen, A., Matijevic, M., Kilaas, R., Kisielowski, C., Diebold, A.C.

“…The image quality in electron microscopy often suffers from lens aberration. As a result of lens aberrations, critical information appears distorted at the…”
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