Design of a packaging-friendly double-topology RF MEMS switch for space applications

This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.

Bibliographic Details

Published in:	Microsystem technologies : sensors, actuators, systems integration Vol. 25; no. 1; pp. 51 - 55
Main Authors:	Savin, Evgeny A., Kirtaev, Roman V., Zhukov, Andrey A., Didyk, Pavel I.
Format:	Journal Article
Language:	English
Published:	Berlin/Heidelberg Springer Berlin Heidelberg 09-01-2019
Subjects:	Electronics and Microelectronics Engineering Instrumentation Mechanical Engineering Nanotechnology Technical Paper
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!