Search Results - "Desre, H."

Study of the plasma and cleaning impact on a CoWPB material by Rébiscoul, D., Desre, H., Dumas, L., Jagueneau, T., Roure, M.-C., Passemard, G.

“…Self-aligned barriers (SAB) are investigated for the 45 nm technology node and beyond to improve copper electromigration and stress-migration resistance. The…”
Get full text

Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications by Herth, E., Desré, H., Algré, E., Legrand, C., Lasri, T.

“…The aim of this work is to determine optimal deposition parameters of silicon nitride for optical applications. The authors present the investigation of…”
Get full text