Search Results - "Delan, Annekatrin"
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Enhanced Process Control for Dry Etching of Functional TiN Structures on 300 mm Wafer Level
Published in 2024 IEEE 10th Electronics System-Integration Technology Conference (ESTC) (11-09-2024)“…Titanium nitride (TiN) is an attractive material for various applications due to its unique physical, chemical and electrical properties. Heterogeneous system…”
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Conference Proceeding -
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A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N-doped TiO sub(2) thin Films
Published in Plasma processes and polymers (01-06-2009)“…A correlation between the photocatalytic efficiency and gas sensitivity has been attempted on pure and N-doped TiO sub(2) thin films prepared by pulsed DC…”
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Journal Article -
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A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N‐doped TiO 2 thin Films
Published in Plasma processes and polymers (01-06-2009)“…A correlation between the photocatalytic efficiency and gas sensitivity has been attempted on pure and N‐doped TiO 2 thin films prepared by pulsed DC magnetron…”
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Journal Article -
4
A Comparative Study on the Photocatalytic and Gas Sensing Properties of Pure and N-doped TiO2 thin Films
Published in Plasma processes and polymers (01-06-2009)“…A correlation between the photocatalytic efficiency and gas sensitivity has been attempted on pure and N‐doped TiO2 thin films prepared by pulsed DC magnetron…”
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Journal Article -
5
Functionalized pyroelectric sensors for gas detection
Published in Sensors and actuators. B, Chemical (24-11-2006)“…A new calorimetric gas sensor based on functionalized integrated pyroelectric detector arrays was fabricated and tested. The advantages of this sensor are…”
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Journal Article -
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Impedimetric Sensors for Monitoring Bacterial Contaminations in Water Pipes
Published in 2022 International Workshop on Impedance Spectroscopy (IWIS) (27-09-2022)“…The contribution describes a sensor system based on impedance spectroscopy that is intended to being used to permanently monitor the drinking water piping with…”
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Conference Proceeding