Search Results - "Delachat, Florian"

Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiNx:H films by Sahu, Bhabani Shankar, Delachat, Florian, Slaoui, Abdelilah, Carrada, Marzia, Ferblantier, Gerald, Muller, Dominique

“…In this study, a wide range of a-SiN x :H films with an excess of silicon (20 to 50%) were prepared with an electron-cyclotron resonance plasma-enhanced…”
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X‐ray characterization of contact holes for block copolymer lithography by Sunday, Daniel F., Delachat, Florian, Gharbi, Ahmed, Freychet, Guillaume, Liman, Christopher D., Tiron, Raluca, Kline, R. Joseph

“…The directed self‐assembly (DSA) of block copolymers (BCPs) is a promising low‐cost approach to patterning structures with critical dimensions (CDs) which are…”
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Fabrication of Buckling Free Ultrathin Silicon Membranes by Direct Bonding with Thermal Difference by Delachat, Florian, Constancias, Christophe, Fournel, Frank, Morales, Christophe, Le Drogoff, Boris, Chaker, Mohamed, Margot, Joelle

“…An innovative method to fabricate large area (up to several squared millimeters) ultrathin (100 nm) monocrystalline silicon (Si) membranes is described. This…”
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Repeatability of Nanoimprint Lithography Monitor Through Line Roughness Extraction by Teyssedre, Hubert, Delachat, Florian, Khan, Jonas, Reche, Jerome, Stirner, Manuela, Ledel, Peter

“…In twenty years, consequent technical developments have been achieved to make the soft stamp nano imprint lithography (NIL technology mature for high volume…”
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Balancing Block Copolymer Thickness over Template Density in Graphoepitaxy Approach by Barros, Patricia Pimenta, Gharbi, Ahmed, Fouquet, Antoine, Bos, Sandra, Hazart, Jérôme, Delachat, Florian, Chevalier, Xavier, Cayrefourcq, Ian, Pain, Laurent, Tiron, Raluca

“…Directed self‐assembly (DSA) of block copolymers (BCP) is one of the most promising patterning solutions for sub‐10 nm nodes. While significant achievements…”
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Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiN x :H films by Sahu, Bhabani Shankar, Delachat, Florian, Slaoui, Abdelilah, Carrada, Marzia, Ferblantier, Gerald, Muller, Dominique

“…Abstract In this study, a wide range of a-SiN x :H films with an excess of silicon (20 to 50%) were prepared with an electron-cyclotron resonance…”
Get full text