Search Results - "Dehé, Alfons"

Dual-Backplate CMUTs with Wide Bandwidth and Low Driving Voltage for Airborne Applications by Anzinger, Sebastian, Bretthauer, Christian, Wasisto, Hutomo Suryo, Dehe, Alfons

“…In this work, novel airborne capacitive micromachined ultrasonic transducers (CMUTs) based on a dual-backplate (DBP) technology are presented. In contrast to…”
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Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers by Becker, Dennis, Littwin, Moritz, Bittner, Achim, Dehé, Alfons

“…Recent publications on acoustic MEMS transducers present a new three-dimensional folded diaphragm that utilizes buried in-plane vibrating structures to…”
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Acoustic transmission line based modelling of microscaled channels and enclosures by Anzinger, Sebastian, Manz, Johannes, Bretthauer, Christian, Krumbein, Ulrich, Dehé, Alfons

“…An analytical model is presented that describes the acoustical impedance of cylindrical tubes and concentrically connected systems of such tubes valid up to…”
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Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes by Bosetti, Gabriele, Manz, Johannes, Dehé, Alfons, Krumbein, Ulrich, Schrag, Gabriele

“…This paper presents a physics-based system-level compact model of a novel out-of-plane capacitive MEMS transducer for detection of mechanical forces, pressure…”
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Silicon microphone development and application by Dehe, Alfons

“…This paper gives an overview of the development of Silicon microphones fabricated in a standard BiCMOS process line of Infineon. MEMS development results in…”
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AC transfer function of electrostatic capacitive sensors based on the 1-D equivalent model: application to silicon microphones by Nadal-Guardia, R., Brosa, A.M., Dehe, A.

“…Parallel plate electrostatic transducers can be described with the one-dimensional (1-D) lumped model. The one-dimensional approximation based on the elastic,…”
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Improved Mounting of Strain Sensors by Reactive Bonding by Schumacher, Axel, Shah, Vraj, Steckemetz, Stefan, Dietrich, Georg, Pflug, Erik, Hehn, Thorsten, Knappmann, Stephan, Dehé, Alfons, Leson, Andreas

“…Aim of this work is to improve the bond between a strain sensor and a device on which the strain shall be determined. As strain sensor, a CMOS-integrated chip…”
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Plasma techniques in the production of customized MEMS‐applications by Bittner, Achim, Hochstein, David, Rockstroh, Jan, Dehnert, Jan, Hedrich, Frank, Billat, Sophie, Dehé, Alfons

“…Micro electromechanical systems (MEMS) have found their way into many kinds of applications. Especially sensors are daily used by each of us in products like…”
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Sensor-Based Nerve Compression Measurement: A Scoping Review of Current Concepts and a Preclinical Evaluation of Commercial Microsensors by Daeschler, Simeon C., Wienbruch, Rebecca, Bursacovschi, Catalina, Zimmermann, Kim Sophie, Nemariam, Selam Bekure, Harhaus, Leila, Kneser, Ulrich, Dehé, Alfons, Bittner, Achim

“…Background: Chronic nerve compression is the most common indication for nerve surgery. However, the clinical diagnosis still relies on surrogate parameters…”
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Investigating fracture strength of poly-silicon membranes using microscopic loading tests and numerical simulation by Brueckner, John, Dehé, Alfons, Auerswald, Ellen, Dudek, Rainer, Vogel, Dietmar, Michel, Bernd, Rzepka, Sven

“…The fracture strength of poly-silicon as widely used membrane material in micro electro mechanical system applications has a critical impact in respect to…”
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Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle by Tumpold, David, Kaltenbacher, Manfred, Glacer, Christoph, Nawaz, Mohsin, Dehé, Alfons

“…The need for computer modeling tools capable of precisely simulating multi-field interactions is increasing. The accurate modeling of an electrostatically…”
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Constant charge operation of capacitor sensors based on switched-current circuits by Nadal-Guardia, R., Brosa, A.M., Dehe, A.

“…A new method to perform the readout of capacitive sensors is presented in this paper. The sensitivity of integrated capacitive sensors is investigated and…”
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Design of a poly silicon MEMS microphone for high signal-to-noise ratio by Dehe, Alfons, Wurzer, Martin, Fuldner, Marc, Krumbein, Ulrich

“…This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly silicon membrane system. MEMS chips from 1.4mm down to 1.0mm…”
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Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors by Dehé, Alfons, Hartnagel, Hans L., Pavlidis, Dimitris, Hong, Kyushik, Kuphal, E.

“…We present a concept for the realization of InGaAs/InP micromachined thermoelectric sensors. The advantages of InGaAs lattice matched to InP combine perfectly…”
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Low Power Capacitive Ultrasonic Transceiver Array for Airborne Object Detection by Anzinger, Sebastian, Lickert, Fabian, Fusco, Alessandra, Bosetti, Gabriele, Tumpold, David, Bretthauer, Christian, Dehe, Alfons

“…This work presents a low power ultrasonic transceiver line array enabling energy efficient airborne object detection. The line array is based on capacitive…”
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A novel silicon "star-comb" microphone concept for enhanced signal-to-noise-ratio: Modeling, design and first prototype by Manz, Johannes, Bosetti, Gabriele, Dehé, Alfons, Schrag, Gabriele

“…A novel comb-structure-based, capacitive MEMS microphone concept is proposed, which is expected to significantly reduce viscous damping losses, challenging the…”
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A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones by Anzinger, Sebastian, Bretthauer, Christian, Tumpold, David, Dehe, Alfons

“…This work provides an analytical non-linear model for the capacitive transduction in MEMS transducers with perforated counter-electrodes, especially applicable…”
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Broadband thermoelectric microwave power sensors using GaAs foundry process by Dehe, A., Fricke-Neuderth, K., Krozer, V.

“…The paper presents the first demonstration of an integrated MMIC compatible thermoelectric microwave power sensor for frequencies between 1 to 20 GHz using a…”
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Analytical analysis and finite element simulation of advanced membranes for silicon microphones by Fuldner, M., Dehe, A., Lerch, R.

“…In this paper, advanced membrane designs are simulated in order to improve the sensitivity of micromachined silicon condenser microphones. Analytical analyzes…”
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Design and Characterization of Macroscopic Indirect Photoacoustic Gas Sensor by Srivastava, Ananya, Tian, Yuanji, Bittner, Achim, Dehe, Alfons

“…A macroscopic photoacoustic gas sensing (PAS) system, along with the design considerations, are presented in this paper. The system is based on the indirect…”
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