Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge

Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge

Cathodic cage discharge was developed recently in order to eliminate phenomena such as edge effect and overheating, which occur during conventional processing. The effect of cage configuration in active species during deposition and the optical properties of TiN films were studied. TiN was chosen be...

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Bibliographic Details
Published in:Materials research (São Carlos, São Paulo, Brazil) Vol. 16; no. 4; pp. 766 - 771
Main Authors: Daudt, N de F, Barbosa, J C P, Macedo, M de O C, Pereira, M B, Alves, C
Format: Journal Article
Language:English
Portuguese
Published: ABM, ABC, ABPol 01-07-2013
Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)
Subjects:
Cage
cathodic cage
Crystallinity
Deposition
Discharge
ENGINEERING, CHEMICAL
Film thickness
MATERIALS SCIENCE, MULTIDISCIPLINARY
METALLURGY & METALLURGICAL ENGINEERING
Monitoring
Optical Emission Spectroscopy
Optical properties
plasma deposition
thin films
Titanium nitride
cathodic cage
plasma deposition
optical properties
titanium nitride
Optical Emission Spectroscopy
thin films
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Summary:Cathodic cage discharge was developed recently in order to eliminate phenomena such as edge effect and overheating, which occur during conventional processing. The effect of cage configuration in active species during deposition and the optical properties of TiN films were studied. TiN was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and had different numbers of holes and hole diameters. The electrical efficiency of the system and the optical properties of the TiN films were strongly influenced by experimental conditions. It was found that, with more holes at the top of cage, deposition rate and crystallinity were higher, compared to cages with a small number of holes at the top. However, the opposite behaviour was seen when more holes were located at the sidewall of cage.
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ISSN:1516-1439
1980-5373
1980-5373
DOI:10.1590/s1516-14392013005000065