Search Results - "Daubriac, R."
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1
Stress relaxation and dopant activation in nsec laser annealed SiGe
Published in 2021 20th International Workshop on Junction Technology (IWJT) (10-06-2021)“…Defect evolution and dopant activation are intimately related to the use of ion implantation and annealing, traditionally used to dope semiconductors during…”
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Conference Proceeding -
2
High performance CMOS FDSOI devices activated at low temperature
Published in 2016 IEEE Symposium on VLSI Technology (01-06-2016)“…3D sequential integration requires top FETs processed with a low thermal budget (500-600°C). In this work, high performance low temperature FDSOI devices are…”
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Conference Proceeding -
3
Nanosecond Laser Annealing: impact on superconducting Silicon on Insulator epilayers
Published 25-06-2024“…We present superconducting monocrystalline Silicon On Insulator thin 33 nm epilayers. They are obtained by nanosecond laser annealing under ultra-high vacuum…”
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Journal Article -
4
Differential hall characterization of shallow strained SiGe layers
Published in 2016 IEEE Nanotechnology Materials and Devices Conference (NMDC) (01-10-2016)“…A Differential Hall Effect method has been developed that allows to determine of the dopant activation level of SiGe alloys in the surface region. The…”
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Conference Proceeding