Combination of excimer laser micromachining and replication processes suited for large scale production

Combination of excimer laser micromachining and replication processes suited for large scale production

Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (“Laser-LIGA”). Thus, the original microstructures, made from PMMA and novolak layers applyi...

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Bibliographic Details
Published in:Applied surface science Vol. 86; no. 1; pp. 251 - 258
Main Authors: Arnold, J., Dasbach, U., Ehrfeld, W., Hesch, K., Löwe, H.
Format: Journal Article Conference Proceeding
Language:English
Published: Amsterdam Elsevier B.V 01-02-1995
Elsevier Science
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Scanning electron microscopy
Mass production
X ray lithography
Methyl methacrylate polymer
Electroplating
Experimental study
Aspect ratio
Microelectronic fabrication
Novolac
Injection molding
Replication
Laser beam machining
Microstructure
Production process
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Description
Summary:Results are reported obtained by a process sequence comprising excimer laser ablation of microstructures, inverse replication by an electroplating process and second inverse replication by injection moulding (“Laser-LIGA”). Thus, the original microstructures, made from PMMA and novolak layers applying a commercial 193 nm excimer laser micromachining work-station and showing structural variety and aspect ratios up to 10, were replicated with high structural fidelity by a low cost process suited for large scale production.
ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(94)00386-6