Search Results - "DUBNER, A. D"
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Focused ion beam induced deposition of gold
Published in Applied physics letters (08-12-1986)“…A finely focused ion beam is scanned over a surface on which a local gas ambient of dimethyl gold hexafluoro acetylacetonate is created by a directed miniature…”
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Journal Article -
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Diffraction effects and image blurring in x‐ray proximity printing
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1992)“…The influence of diffraction on the shape and size of features printed using x‐ray proximity printing is reviewed, and the effect of image blurring on these…”
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Conference Proceeding -
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Mechanism of ion beam induced deposition of gold
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-11-1989)“…Gold films were deposited on quartz crystal microbalances (QCM) by decomposing C7H7F6O2Au [dimethyl gold hexafluoroacetylacetonate, or DMG(hfac)] with a 5 keV…”
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Conference Proceeding Journal Article -
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Diffraction effects in x‐ray proximity printing
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-09-1992)“…The influence of diffraction on the shape and size of features printed using x‐ray proximity printing with a collimated x‐ray source (measured beam divergence…”
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Journal Article -
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Summary Abstract: Ion induced deposition of gold films
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-05-1988)Get full text
Journal Article