Search Results - "DE BOER, Wie Be"
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VUV/Low-Energy Electron Si Photodiodes With Postmetal 400 °C PureB Deposition
Published in IEEE electron device letters (01-12-2013)Get full text
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VUV/Low-Energy Electron Si Photodiodes With Postmetal 400 ^ PureB Deposition
Published in IEEE electron device letters (01-12-2013)“…Pure boron (PureB) chemical-vapor deposition performed at 400°C is applied as a postmetalization process module to fabricate near-ideal p + n photodiodes with…”
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Journal Article